From qwang at snf.stanford.edu Tue Dec 2 15:17:13 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Tue, 2 Dec 2003 15:17:13 -0800 Subject: Shutdown innotec 2003-12-02 15:17:12: planetary rotation system is down Message-ID: From charley at snf.stanford.edu Tue Dec 2 16:53:42 2003 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Tue, 2 Dec 2003 16:53:42 -0800 Subject: Shutdown innotec 2003-12-02 15:17:12: planetary rotation system is down Message-ID: Not 'shut down' problem, just yellow From charley at snf.stanford.edu Tue Dec 2 16:54:46 2003 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Tue, 2 Dec 2003 16:54:46 -0800 Subject: Problem innotec 2003-12-02 16:54:45: Planetary drive down Message-ID: Planetary drive inoperative From jhaydon at snf.stanford.edu Wed Dec 3 11:12:50 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Dec 2003 11:12:50 -0800 Subject: Problem innotec 2003-12-02 16:54:45: Planetary drive down Message-ID: new bearings installed works now ok to use From zlrao at snf.stanford.edu Wed Dec 3 18:21:18 2003 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: Wed, 3 Dec 2003 18:21:18 -0800 Subject: Problem innotec 2003-12-03 18:21:17: couldn't pump down Message-ID: Might have accidentally hit abort during deposition. Turned off and on the power again. The 'Tank' light wasn't lit after pressing reset. Vented the chamber. While trying to pump down, MDC abort kept shown. Chamber left venting. From qwang at snf.stanford.edu Wed Dec 3 21:58:18 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Wed, 3 Dec 2003 21:58:18 -0800 Subject: Comment innotec 2003-12-03 21:58:18: The chamber start to be pumping down Message-ID: The front cover of chamber is found slightly openning. The protect system shut down the power for safety. Now I closed the cover and the pumping system start working. From jhaydon at snf.stanford.edu Thu Dec 4 11:52:57 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 4 Dec 2003 11:52:57 -0800 Subject: Problem innotec 2003-12-03 18:21:17: couldn't pump down Message-ID: