Problem innotec 2003-12-03 18:21:17: couldn't pump down

zlrao at snf.stanford.edu zlrao at snf.stanford.edu
Wed Dec 3 18:21:18 PST 2003


Might have accidentally hit abort during deposition. Turned off 
and on the power again.  The 'Tank' light wasn't lit after 
pressing reset. Vented the chamber. While trying to pump down, MDC abort kept shown. Chamber left venting.




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