Comment innotec 2003-12-03 21:58:18: The chamber start to be pumping down

qwang at qwang at
Wed Dec 3 21:58:18 PST 2003

The front cover of chamber is found slightly openning. The protect system shut down the power for safety. Now I closed the cover and the pumping system start working.  

More information about the innotec-pcs mailing list