From aokyay at snf.stanford.edu Sun Aug 1 14:03:05 2004 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sun, 1 Aug 2004 14:03:05 -0700 Subject: Problem innotec SNF 2004-08-01 14:03:02: Al (C2) source evaporated critically deep Message-ID: Al source is significantly gone in the center. Also, the crucible is evaporated in the front and completely lost its circular shape... The Al source could now have undesired W incorporation. From me342e at snf.stanford.edu Tue Aug 3 06:35:27 2004 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Tue, 3 Aug 2004 06:35:27 -0700 Subject: Problem innotec SNF 2004-08-03 06:35:26: innotec problem Message-ID: i was using Ti and Au, I set power of Ti 2.0, but after I open the shutter 1, the rate and thickness remained 0 on the screen, I tried one more time, the same. I opened the chamber, it seemed the Ti wasn't sputtered at all. From parco at snf.stanford.edu Tue Aug 3 08:49:58 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 3 Aug 2004 08:49:58 -0700 Subject: Shutdown innotec SNF 2004-08-03 08:49:57: someone put up an" equipment out of service "sign Message-ID: From jperez at snf.stanford.edu Tue Aug 3 09:17:22 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 09:17:22 -0700 Subject: Shutdown innotec SNF 2004-08-03 08:49:57: someone put up an" equipment out of service "sign Message-ID: We will check out the system, but believe it was too low power to get any deposition. From jperez at snf.stanford.edu Tue Aug 3 09:18:28 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 09:18:28 -0700 Subject: Problem innotec SNF 2004-07-28 14:38:16: Ti Source-Contaminated Message-ID: Replaced the Ti source. From jperez at snf.stanford.edu Tue Aug 3 09:19:31 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 09:19:31 -0700 Subject: Problem innotec SNF 2004-08-01 14:03:02: Al (C2) source evaporated critically deep Message-ID: Previous user deposited a thick layer of Al. From jperez at snf.stanford.edu Tue Aug 3 09:20:03 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 09:20:03 -0700 Subject: Problem innotec SNF 2004-08-03 06:35:26: innotec problem Message-ID: Power was too low to deposit. From jperez at snf.stanford.edu Tue Aug 3 09:48:14 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 09:48:14 -0700 Subject: Problem innotec SNF 2004-08-03 09:48:13: Crystal monitor in process ready, but.... Message-ID: Not measuring dep. rate or thickness. From jperez at snf.stanford.edu Tue Aug 3 10:01:57 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2004 10:01:57 -0700 Subject: Problem innotec SNF 2004-08-03 09:48:13: Crystal monitor in process ready, but.... Message-ID: Dual crystal and front crystal hold doesn't work, but shutter was blocking back crystal holder . That is the reason why we didn't get any reading. From zlrao at snf.stanford.edu Sun Aug 8 15:27:46 2004 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: Sun, 8 Aug 2004 15:27:46 -0700 Subject: Problem innotec SNF 2004-08-08 15:27:45: problem with crystal health Message-ID: During Au deposition, crystal health jumped up to 99% from 90%. After reset, it droped down to 89% and became normal during following deposition. From jhaydon at snf.stanford.edu Tue Aug 10 09:44:20 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 10 Aug 2004 09:44:20 -0700 Subject: Problem innotec SNF 2004-08-08 15:27:45: problem with crystal health Message-ID: this happens some times From ratiug at snf.stanford.edu Tue Aug 10 18:41:28 2004 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Tue, 10 Aug 2004 18:41:28 -0700 Subject: Problem innotec SNF 2004-08-10 18:41:28: no window film to advance Message-ID: From jperez at snf.stanford.edu Wed Aug 11 09:26:59 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 11 Aug 2004 09:26:59 -0700 Subject: Problem innotec SNF 2004-08-10 18:41:28: no window film to advance Message-ID: New roll of film has been installed. From leet at snf.stanford.edu Wed Aug 18 00:23:35 2004 From: leet at snf.stanford.edu (leet at snf.stanford.edu) Date: Wed, 18 Aug 2004 00:23:35 -0700 Subject: Problem innotec SNF 2004-08-18 00:23:35: C4 has white residue Message-ID: Crucible C4 (Ti, Cr, Ni, Ag) has a hard, white, thick residue from a previous deposition. Appearance is consistent with heavy oxidation of source material. From ratiug at snf.stanford.edu Wed Aug 18 16:08:02 2004 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Wed, 18 Aug 2004 16:08:02 -0700 Subject: Problem innotec SNF 2004-08-18 16:08:00: crystal failure Message-ID: Crystal failure when the cyrstal health go from 87 to 98. Lose thickness detection ! From kwang at snf.stanford.edu Wed Aug 18 17:53:58 2004 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Wed, 18 Aug 2004 17:53:58 -0700 Subject: Problem innotec SNF 2004-08-18 17:53:58: hard to put crystal holder back Message-ID: it was very hard to put the crystal holders back to place. couldn't put the front one in. it is left together with the bag of new crystals. From jperez at snf.stanford.edu Mon Aug 23 08:02:26 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2004 08:02:26 -0700 Subject: Problem innotec SNF 2004-08-18 00:23:35: C4 has white residue Message-ID: Depositions, especially thick depositions are seeping to the other neighboring pockets. From jperez at snf.stanford.edu Mon Aug 23 08:38:12 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2004 08:38:12 -0700 Subject: Problem innotec SNF 2004-08-18 16:08:00: crystal failure Message-ID: Always make sure before closing the belljar that the crystal holder in all the way back in its drawer. From jperez at snf.stanford.edu Mon Aug 23 08:42:39 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2004 08:42:39 -0700 Subject: Problem innotec SNF 2004-08-18 17:53:58: hard to put crystal holder back Message-ID: I replaced the crystal holder with the last holder we have for thissetup. Please replace your crystals with care. Do Not lift from the center ceramic contact. Use the sides of the holder to lift. From nmiller at snf.stanford.edu Mon Aug 23 23:08:31 2004 From: nmiller at snf.stanford.edu (nmiller at snf.stanford.edu) Date: Mon, 23 Aug 2004 23:08:31 -0700 Subject: Problem innotec SNF 2004-08-23 23:08:30: Cr contaminated with Au Message-ID: From jperez at snf.stanford.edu Tue Aug 24 10:32:13 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Aug 2004 10:32:13 -0700 Subject: Problem innotec SNF 2004-08-23 23:08:30: Cr contaminated with Au Message-ID: Replaced contaminated Cr with new Cr source.