Problem innotec SNF 2004-08-03 06:35:26: innotec problem

me342e at snf.stanford.edu me342e at snf.stanford.edu
Tue Aug 3 06:35:27 PDT 2004


i was using Ti and Au, I set power of Ti 2.0, but after I open the shutter 1, the rate and thickness remained 0 on the screen, I tried one more time, the same. 
I opened the chamber, it seemed the Ti wasn't sputtered at all.




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