Problem innotec SNF 2004-08-08 15:27:45: problem with crystal health

zlrao at snf.stanford.edu zlrao at snf.stanford.edu
Sun Aug 8 15:27:46 PDT 2004


During Au deposition, crystal health jumped up to 99% from 90%. After reset, it droped down to 89% and became normal during following deposition.




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