Problem innotec 2004-06-01 13:08:22: Crystal holders/pockets not working

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Jun 1 13:08:23 PDT 2004


At the start of deposition crystal failed. Vented chamber
and try to troubleshoot. The system was not activating back 
crystal pocket. Called Jim, he tried. It seemed that the front
pocket was acepting crystal. Decided to try the deposition
but it did not show any deposition. Completed my run w/o crystal.




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