From jperez at snf.stanford.edu Mon Aug 1 07:36:26 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:36:26 -0700 Subject: Comment innotec SNF 2005-05-11 16:31:33: needs 1um Al coat Message-ID: Completed by Eric From jperez at snf.stanford.edu Mon Aug 1 07:38:51 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:38:51 -0700 Subject: Comment innotec SNF 2005-06-04 18:13:04: bringing down the bell jar Message-ID: Bell jar roughness just at the start, bring it down slow and you may have to stop for a second and than restart. Last three times for me it has ran smooth. From srim at snf.stanford.edu Tue Aug 2 22:45:37 2005 From: srim at snf.stanford.edu (srim at snf.stanford.edu) Date: Tue, 2 Aug 2005 22:45:37 -0700 Subject: Problem innotec SNF 2005-08-02 22:45:36: kilovolts meter reads -10.24 and can't see beam thru viewport Message-ID: From me342e at snf.stanford.edu Wed Aug 3 03:51:30 2005 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Wed, 3 Aug 2005 03:51:30 -0700 Subject: Problem innotec SNF 2005-08-03 03:51:29: Innotec: Water problem Message-ID: Hello, When I press "reset", the water light does not reset on the main power system. There is also an interlock WFS1, WFS2 problem on the console. My 5 wafers are currently in the Innotec, and the machine is currently decompressed. Seeing how the machine is innoperable until this problem is solved, please let me know when/how this is solved and I can coat my wafers are be ready for the next person. Thanks in advance. Patrick Chiang c: 650-224-0615 From true at snf.stanford.edu Wed Aug 3 13:16:51 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Wed, 3 Aug 2005 13:16:51 -0700 Subject: Shutdown innotec SNF 2005-08-03 13:16:51: chiller controller malfunctioning Message-ID: Jim says at least a day From jperez at snf.stanford.edu Fri Aug 5 11:09:24 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2005 11:09:24 -0700 Subject: Shutdown innotec SNF 2005-08-03 13:16:51: chiller controller malfunctioning Message-ID: Replaced board on chiller and seems to be controlling temperture. From jperez at snf.stanford.edu Fri Aug 5 11:09:56 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2005 11:09:56 -0700 Subject: Problem innotec SNF 2005-08-03 03:51:29: Innotec: Water problem Message-ID: control board changed From jperez at snf.stanford.edu Fri Aug 5 11:11:41 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2005 11:11:41 -0700 Subject: Problem innotec SNF 2005-08-02 22:45:36: kilovolts meter reads -10.24 and can't see beam thru viewport Message-ID: I was able to see ebeam through viewport, not sure why user couldn't see. From jperez at snf.stanford.edu Fri Aug 5 11:13:05 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2005 11:13:05 -0700 Subject: Problem innotec SNF 2005-07-30 12:42:10: Film in viewport won't advance Message-ID: I was able to advance the film, maybe it got stuck at one point but is working now. From faraon at snf.stanford.edu Sat Aug 6 19:55:27 2005 From: faraon at snf.stanford.edu (faraon at snf.stanford.edu) Date: Sat, 6 Aug 2005 19:55:27 -0700 Subject: Problem innotec SNF 2005-08-06 19:55:27: Ni target Message-ID: No Ni target on Innotec. Destroyed during evapoaration. From srim at snf.stanford.edu Tue Aug 9 17:46:16 2005 From: srim at snf.stanford.edu (srim at snf.stanford.edu) Date: Tue, 9 Aug 2005 17:46:16 -0700 Subject: Comment innotec SNF 2005-08-09 17:46:15: don't go below 1.2e-6 after 2hrs Message-ID: after 2hrs of pumping down, it doesn't go below 1.2e-6. so i didn't do any deposition. From mcintoda at snf.stanford.edu Tue Aug 9 20:57:47 2005 From: mcintoda at snf.stanford.edu (mcintoda at snf.stanford.edu) Date: Tue, 9 Aug 2005 20:57:47 -0700 Subject: Comment innotec SNF 2005-08-09 20:57:46: shuddering when lower bell Message-ID: There is severe shuddering when the bell jar is lowered. From me342f at snf.stanford.edu Wed Aug 10 02:22:06 2005 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Wed, 10 Aug 2005 02:22:06 -0700 Subject: Comment innotec SNF 2005-08-10 02:22:06: shuddering Message-ID: Same comment as previous user. From jperez at snf.stanford.edu Mon Aug 15 08:05:49 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Aug 2005 08:05:49 -0700 Subject: Problem innotec SNF 2005-08-06 19:55:27: Ni target Message-ID: Has been replaced From jperez at snf.stanford.edu Mon Aug 15 08:06:58 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Aug 2005 08:06:58 -0700 Subject: Comment innotec SNF 2005-08-09 17:46:15: don't go below 1.2e-6 after 2hrs Message-ID: Unsure what the problem was at that time , but hasn't happen since. From jperez at snf.stanford.edu Mon Aug 15 08:12:36 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Aug 2005 08:12:36 -0700 Subject: Comment innotec SNF 2005-08-09 20:57:46: shuddering when lower bell Message-ID: We know of the problem with the bell jar. Jim Haydon to do repairs in December during shut down. When the belljar vibrates too much, stop bring the bell jar down and wait until the bell jar stops vibrating and then continue bring the bell jar down. From jperez at snf.stanford.edu Mon Aug 15 08:13:33 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Aug 2005 08:13:33 -0700 Subject: Comment innotec SNF 2005-08-10 02:22:06: shuddering Message-ID: Bell jar to be repaired in 12/05, during Lab shut down From lsmoore at snf.stanford.edu Mon Aug 15 19:22:59 2005 From: lsmoore at snf.stanford.edu (lsmoore at snf.stanford.edu) Date: Mon, 15 Aug 2005 19:22:59 -0700 Subject: Problem innotec SNF 2005-08-15 19:22:58: Au target stuck in crucible Message-ID: After my evaporation I had to leave the Au target in the crucible because it was stuck. It is possible that the next user will be able to remove it once it has melted again. I am not sure what else to do in this situation. From jperez at snf.stanford.edu Thu Aug 18 07:26:17 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Aug 2005 07:26:17 -0700 Subject: Problem innotec SNF 2005-08-15 19:22:58: Au target stuck in crucible Message-ID: Removed Au From mcintoda at snf.stanford.edu Sat Aug 20 17:12:07 2005 From: mcintoda at snf.stanford.edu (mcintoda at snf.stanford.edu) Date: Sat, 20 Aug 2005 17:12:07 -0700 Subject: Problem innotec SNF 2005-08-20 17:12:06: Cryo Pump Message-ID: Cryo Pump Temp at 23K, failed pumpdown. Crypump regeneration by ericp 15:00-17:00 8-20-05 From mcintoda at snf.stanford.edu Sat Aug 20 22:39:38 2005 From: mcintoda at snf.stanford.edu (mcintoda at snf.stanford.edu) Date: Sat, 20 Aug 2005 22:39:38 -0700 Subject: Comment innotec SNF 2005-08-20 22:39:37: innotec back up Message-ID: The cryopump was regenerated and temp is back to 13K, made deposition sat. night. From jperez at snf.stanford.edu Mon Aug 22 07:11:36 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 22 Aug 2005 07:11:36 -0700 Subject: Problem innotec SNF 2005-08-20 17:12:06: Cryo Pump Message-ID: Regen Cryo pump by Eric P From jperez at snf.stanford.edu Mon Aug 22 07:11:55 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 22 Aug 2005 07:11:55 -0700 Subject: Comment innotec SNF 2005-08-20 22:39:37: innotec back up Message-ID: Regen completed From levi at snf.stanford.edu Sun Aug 28 01:12:55 2005 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Sun, 28 Aug 2005 01:12:55 -0700 Subject: Problem innotec SNF 2005-08-28 01:12:54: WFS1 WFS2 interlock sign Message-ID: can not find where to reset this interlock, and filament gun 1 is interlocked so gun will not come on. I could not find any user manual to look at , so I cancel my deposition. sample is removed from chamber From jperez at snf.stanford.edu Tue Aug 30 08:57:09 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2005 08:57:09 -0700 Subject: Problem innotec SNF 2005-08-28 01:12:54: WFS1 WFS2 interlock sign Message-ID: Problem has been corrected.