Problem innotec SNF 2005-08-03 03:51:29: Innotec: Water problem

[me342e at snf.stanford.edu]

Hello,
When I press "reset", the water light does not reset on the main power system.  There is also an interlock WFS1, WFS2 problem on the console.  
My 5 wafers are currently in the Innotec, and the machine is 
currently decompressed.  Seeing how the machine is innoperable until this problem is solved, please let me know when/how
this is solved and I can coat my wafers are be ready for the next person.  
Thanks in advance.
Patrick Chiang
c: 650-224-0615