Problem innotec SNF 2005-08-28 01:12:54: WFS1 WFS2 interlock sign

levi at snf.stanford.edu levi at snf.stanford.edu
Sun Aug 28 01:12:55 PDT 2005


can not find where to reset this interlock, and filament gun 1 is interlocked so gun will not come on. 
I could not find any user manual to look at , so I cancel my deposition. sample is removed from chamber




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