From jperez at snf.stanford.edu  Tue Feb  1 08:14:11 2005
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 1 Feb 2005 08:14:11 -0800
Subject: Problem innotec SNF 2005-01-29 20:29:13: Found the machine with an OUT of SERVICE sign on it
Message-ID: <mailman.336.1357938399.25732.innotec-pcs@snf.stanford.edu>

Previous use had problems getting an e-beam. Since then, 3 
others used the system without any problems. Will work with 
previous user today on getting his wafers evaporated.



From aokyay at snf.stanford.edu  Wed Feb  2 17:29:14 2005
From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu)
Date: Wed, 2 Feb 2005 17:29:14 -0800
Subject: Comment innotec SNF 2005-02-02 17:29:14: C2 (Al) edges deformed
Message-ID: <mailman.337.1357938399.25732.innotec-pcs@snf.stanford.edu>




From pethe at snf.stanford.edu  Tue Feb 22 23:49:47 2005
From: pethe at snf.stanford.edu (pethe at snf.stanford.edu)
Date: Tue, 22 Feb 2005 23:49:47 -0800
Subject: Problem innotec SNF 2005-02-22 23:49:47: Chamber Pressure high
Message-ID: <mailman.338.1357938399.25732.innotec-pcs@snf.stanford.edu>

Could not pump down the chamber to pressures less than 1e-6 Torr even after a 2hr pump down.



From jhaydon at snf.stanford.edu  Wed Feb 23 10:46:23 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Feb 2005 10:46:23 -0800
Subject: Problem innotec SNF 2005-02-22 23:49:47: Chamber Pressure high
Message-ID: <mailman.339.1357938399.25732.innotec-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Feb 23 10:47:05 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Feb 2005 10:47:05 -0800
Subject: Shutdown innotec SNF 2005-02-23 10:47:04: problem with ion pump controller or ion gauge
Message-ID: <mailman.340.1357938399.25732.innotec-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Feb 23 15:01:37 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Feb 2005 15:01:37 -0800
Subject: Shutdown innotec SNF 2005-02-23 10:47:04: problem with ion pump controller or ion gauge
Message-ID: <mailman.341.1357938399.25732.innotec-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Feb 23 15:02:27 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Feb 2005 15:02:27 -0800
Subject: Shutdown innotec SNF 2005-02-23 15:02:26: 
Message-ID: <mailman.342.1357938399.25732.innotec-pcs@snf.stanford.edu>

bad diode in ion gauge controller shoould have part tommorrow



From cbaxter at snf.stanford.edu  Fri Feb 25 19:21:03 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 25 Feb 2005 19:21:03 -0800
Subject: Shutdown innotec SNF 2005-02-23 15:02:26: 
Message-ID: <mailman.343.1357938399.25732.innotec-pcs@snf.stanford.edu>

hooked up the he leak detector and picked up a 4 scale
atm leak at lower view port window. eric and i noticed
the mounting ring that hold down quartz widnow was loose.
we disassemble window assy and cleaned and tighten
down. re-verified  he leak on window, no leak detected.
chamber pressure is at 6e-7 after 1:15. of pumping.