From hpbae at snf.stanford.edu Sun Oct 2 14:11:58 2005 From: hpbae at snf.stanford.edu (hpbae at snf.stanford.edu) Date: Sun, 2 Oct 2005 14:11:58 -0700 Subject: Comment innotec SNF 2005-10-02 14:11:57: Cooling water is off. Message-ID: Evaporation not possible until chiller in the basement is turned back on. Our samples are still inside as of 2PM, Oct 2. From xinranw at snf.stanford.edu Mon Oct 3 20:54:21 2005 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Mon, 3 Oct 2005 20:54:21 -0700 Subject: Problem innotec SNF 2005-10-03 20:54:20: Aux2 light is not lit after turn on the power Message-ID: From xinranw at snf.stanford.edu Tue Oct 4 01:23:16 2005 From: xinranw at snf.stanford.edu (xinranw at snf.stanford.edu) Date: Tue, 4 Oct 2005 01:23:16 -0700 Subject: Comment innotec SNF 2005-10-04 01:23:15: system ok Message-ID: I think I had the problem because the user before me disabled me. I enabled the machine again and everything is ok. From jperez at snf.stanford.edu Tue Oct 4 07:12:50 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Oct 2005 07:12:50 -0700 Subject: Problem innotec SNF 2005-10-03 20:54:20: Aux2 light is not lit after turn on the power Message-ID: Coral wasn't enabled, therefore Aux2 doesn't light up and power supply won't operate. From jperez at snf.stanford.edu Tue Oct 4 07:13:32 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Oct 2005 07:13:32 -0700 Subject: Comment innotec SNF 2005-10-04 01:23:15: system ok Message-ID: System enabled and problem went away. From jperez at snf.stanford.edu Tue Oct 4 07:14:23 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Oct 2005 07:14:23 -0700 Subject: Comment innotec SNF 2005-10-02 14:11:57: Cooling water is off. Message-ID: Chiller refilled and turned back on. From jperez at snf.stanford.edu Tue Oct 25 13:32:10 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 25 Oct 2005 13:32:10 -0700 Subject: Problem innotec SNF 2005-10-25 13:32:06: The crystal isn't working, part on order Message-ID: OK to use if you want to run by time. From jameson at snf.stanford.edu Tue Oct 25 18:38:45 2005 From: jameson at snf.stanford.edu (jameson at snf.stanford.edu) Date: Tue, 25 Oct 2005 18:38:45 -0700 Subject: Comment innotec SNF 2005-10-25 18:38:44: planetary sticky but still moving Message-ID: From gibby at snf.stanford.edu Wed Oct 26 00:12:41 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 26 Oct 2005 00:12:41 -0700 Subject: Shutdown innotec SNF 2005-10-26 00:12:40: Filament Would Not Turn On Message-ID: "Interlock WFS1 WFS2" was displayed on the master console. I've never seen this before. It could be related to the crystal malfunction, but I thought I'd mention it. More importantly, the filament would not turn on. The "water" light on source 1 would not light up, even after multiple resets of the Telemark TT10/15. Thus, the system would not allow me toturn on source 1. Instead of "off" gun filament 1 read "intlk" on the master console. I assume that this is related to the problem. At that point I shut down the system, vented to remove my wafers and the targets, and pumped the system down. As a footnote, I dropped one of my wafers during loading. I did my best to clean up the shards, but some pieces were trapped under the platform at the bottom of the chamber. I don't think this has anything to do with the problem, but I thought I'd mention it just in case. Pumpdown time was 2 hours, 15 minutes. Base Pressure was 5.7e-7 Torr. Cryo temp was 13 K. Pump cossover was heard on both the first and final pumpdowns. From jhaydon at snf.stanford.edu Wed Oct 26 10:35:43 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Oct 2005 10:35:43 -0700 Subject: Shutdown innotec SNF 2005-10-26 00:12:40: Filament Would Not Turn On Message-ID: chiller controller was turned off From josephchen at snf.stanford.edu Fri Oct 28 17:19:47 2005 From: josephchen at snf.stanford.edu (josephchen at snf.stanford.edu) Date: Fri, 28 Oct 2005 17:19:47 -0700 Subject: Shutdown innotec SNF 2005-10-28 17:19:47: Rough pump failed Message-ID: ATM light still lit after 15min when I start pumping. From maurice at snf.stanford.edu Fri Oct 28 17:34:41 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Oct 2005 17:34:41 -0700 Subject: Shutdown innotec SNF 2005-10-28 17:19:47: Rough pump failed Message-ID: Please try reseating belljar From maurice at snf.stanford.edu Fri Oct 28 17:35:42 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Oct 2005 17:35:42 -0700 Subject: Problem innotec SNF 2005-10-28 17:35:24: pumpdown failed Message-ID: Josehpchen had a problem with pumpdown From hpbae at snf.stanford.edu Sun Oct 30 01:07:40 2005 From: hpbae at snf.stanford.edu (hpbae at snf.stanford.edu) Date: Sun, 30 Oct 2005 01:07:40 -0800 Subject: Problem innotec SNF 2005-10-30 01:07:39: TT10/15 controller and crystal monitor.. Message-ID: Pumpdown problem is solved by Eric, ( but pumping is slow. 7e-7 after 3.5 hours) but TT10/15 doesn't power up, and the crystal health reads 0% even after installing a new crystal. Can't proceed.. From jhaydon at snf.stanford.edu Mon Oct 31 09:29:17 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 31 Oct 2005 09:29:17 -0800 Subject: Problem innotec SNF 2005-10-30 01:07:39: TT10/15 controller and crystal monitor.. Message-ID: We know that the crystal monitor isn't working, if you want to use the system you can time the deposition if your not too concern with the thickness. From jhaydon at snf.stanford.edu Mon Oct 31 09:31:22 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 31 Oct 2005 09:31:22 -0800 Subject: Problem innotec SNF 2005-10-28 17:35:24: pumpdown failed Message-ID: Pump in the basement was off. Not sure when that happen. Pump back on. From jhaydon at snf.stanford.edu Mon Oct 31 15:28:09 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 31 Oct 2005 15:28:09 -0800 Subject: Shutdown innotec SNF 2005-10-31 15:28:08: down for regen Message-ID: