Shutdown innotec SNF 2006-01-17 20:53:14: rough pump failed

lwchang at lwchang at
Tue Jan 17 20:53:15 PST 2006

The ATM light didn't go off within 10sec after pressing F5(pump only). Tried reseating bell jar several times, didn't work.Chamber is left vented. Sorry for the inconvenience. 

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