Shutdown innotec SNF 2006-01-17 20:53:14: rough pump failed
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Wed Jan 18 08:22:36 PST 2006
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Shutdown innotec SNF 2006-01-17 20:53:14: rough pump failed
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Problem innotec SNF 2006-01-26 09:06:59: Pump Down
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chamber was probably not down all the way
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Shutdown innotec SNF 2006-01-17 20:53:14: rough pump failed
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Problem innotec SNF 2006-01-26 09:06:59: Pump Down
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