Shutdown innotec SNF 2006-05-11 13:02:10: the cutback fans will not stop flashing

dejia at snf.stanford.edu dejia at snf.stanford.edu
Thu May 11 13:02:17 PDT 2006


The cut back fans will not stop flashing ..it automatically turns off DC power. Not possible to do deposition. I think the problem is with the air/cab because the air/cab led turns off sometime after reset button is pressed.




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