Problem innotec SNF 2006-05-24 17:57:10: The system stopped while pumping.

hideoiw at snf.stanford.edu hideoiw at snf.stanford.edu
Wed May 24 17:57:11 PDT 2006


 The system stopped while pumping. After that, I tried "pump only mode" several times, but it stopped immediately.
I could not make any film and the chamber is left vented.




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