Problem innotec SNF 2006-05-28 11:17:48: AIR/CAB Interlock problem

mislam at snf.stanford.edu mislam at snf.stanford.edu
Sun May 28 11:17:49 PDT 2006


Beam turned off at the begining of deposition. Noticed
AIR/CAB interlock LED turned off. Tried restarting
Telemark controler but AIR/CAB led won't come on.
Also noticed CUT BACK does not flicker at the start.
Run Aborted.




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