Problem innotec SNF 2006-05-28 11:17:48: AIR/CAB Interlock problem

mislam at mislam at
Sun May 28 11:17:49 PDT 2006

Beam turned off at the begining of deposition. Noticed
AIR/CAB interlock LED turned off. Tried restarting
Telemark controler but AIR/CAB led won't come on.
Also noticed CUT BACK does not flicker at the start.
Run Aborted.

More information about the innotec-pcs mailing list