From jnkurtin at snf.stanford.edu Wed Sep 6 18:59:32 2006 From: jnkurtin at snf.stanford.edu (jnkurtin at snf.stanford.edu) Date: Wed, 6 Sep 2006 18:59:32 -0700 Subject: Comment innotec SNF 2006-09-06 18:59:32: system wont pump down Message-ID: It says "process aborted, cover off" but the bell jar is tightly closed. My run was fine, but now the system won't pump down. From rcrane at snf.stanford.edu Thu Sep 7 15:21:22 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 7 Sep 2006 15:21:22 -0700 Subject: Problem innotec SNF 2006-08-30 17:02:40: "Pwr up" control button intermittant Message-ID: Noted, new unit on order. From kimsangb at snf.stanford.edu Fri Sep 8 11:04:31 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 8 Sep 2006 11:04:31 -0700 Subject: Problem innotec SNF 2006-09-08 11:04:31: vacuum hose Message-ID: The mouse of the vacuum hose is hidden. From maurice at snf.stanford.edu Mon Sep 11 10:54:18 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 10:54:18 -0700 Subject: Problem innotec SNF 2006-09-08 11:04:31: vacuum hose Message-ID: removed attatchment from inside the hose From maurice at snf.stanford.edu Mon Sep 11 10:54:55 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 10:54:55 -0700 Subject: Comment innotec SNF 2006-09-06 18:59:32: system wont pump down Message-ID: reseated back panel From josephchen at snf.stanford.edu Mon Sep 11 14:32:08 2006 From: josephchen at snf.stanford.edu (josephchen at snf.stanford.edu) Date: Mon, 11 Sep 2006 14:32:08 -0700 Subject: Problem innotec SNF 2006-09-11 14:32:08: source 1 water LED dosen't light up Message-ID: don't know the reason, source 1 water LED doesn't show when I hit the reset. From maurice at snf.stanford.edu Mon Sep 11 14:47:51 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 14:47:51 -0700 Subject: Shutdown innotec SNF 2006-09-11 14:47:50: chiller off Message-ID: Chiller won't turn on... From maurice at snf.stanford.edu Mon Sep 11 15:02:45 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:02:45 -0700 Subject: Shutdown innotec SNF 2006-09-11 14:47:50: chiller off Message-ID: rcrane added water to chiller From maurice at snf.stanford.edu Mon Sep 11 15:02:57 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:02:57 -0700 Subject: Problem innotec SNF 2006-09-11 14:32:08: source 1 water LED dosen't light up Message-ID: rcrane added water to chiller From maurice at snf.stanford.edu Mon Sep 11 15:22:16 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:22:16 -0700 Subject: Comment innotec SNF 2006-07-17 22:15:23: Power UP Button is STICKY Message-ID: remote controller replaced From maurice at snf.stanford.edu Mon Sep 11 15:22:35 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:22:35 -0700 Subject: Comment innotec SNF 2006-08-31 06:50:26: E-gun power controller is onorder Message-ID: controller replaced From rcrane at snf.stanford.edu Mon Sep 11 15:33:08 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:33:08 -0700 Subject: Problem innotec SNF 2006-08-25 14:47:54: Dep. rate was very unstable for Al deposition Message-ID: Problem noted. Has not been seen again. From rcrane at snf.stanford.edu Mon Sep 11 15:33:48 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:33:48 -0700 Subject: Problem innotec SNF 2006-08-25 15:31:52: Becareful left magnet needs tighting Message-ID: Should have been cleared earlier From rcrane at snf.stanford.edu Mon Sep 11 15:34:39 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Mon, 11 Sep 2006 15:34:39 -0700 Subject: Comment innotec SNF 2006-09-11 15:34:38: Handheld power controller replaced Message-ID: Replaced handheld power controller. From mwiemer at stanford.edu Tue Sep 12 08:18:19 2006 From: mwiemer at stanford.edu (Michael Wiemer) Date: Tue, 12 Sep 2006 08:18:19 -0700 Subject: Reservation Removed 3pm-6pm today In-Reply-To: <20060911223351.E33F24BE21@smtp3.stanford.edu> Message-ID: <000001c6d67e$ada62cd0$766140ab@longmorn> Wafers not ready From gibby at snf.stanford.edu Tue Sep 26 06:16:28 2006 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 26 Sep 2006 06:16:28 -0700 Subject: Problem innotec SNF 2006-09-26 06:16:28: Crystal Health Monitor Erratic Message-ID: Crystal Health kept fluctuating between the actual value (~87%) and 99%. When reading 99% the deposition thickness was correct. With the correct crytal health, the thickness was offset by about 6500A. No idea what is going on... From jperez at snf.stanford.edu Tue Sep 26 07:06:28 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Sep 2006 07:06:28 -0700 Subject: Comment innotec SNF 2006-09-11 15:34:38: Handheld power controller replaced Message-ID: New handheld powercontroller is working great! From jhaydon at snf.stanford.edu Tue Sep 26 08:30:33 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 26 Sep 2006 08:30:33 -0700 Subject: Comment innotec SNF 2005-04-25 14:44:40: Careful when bring down belljar, Message-ID: From jhaydon at snf.stanford.edu Tue Sep 26 08:30:38 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 26 Sep 2006 08:30:38 -0700 Subject: Comment innotec SNF 2005-04-14 08:02:52: BE VERY CAREFUL!!!! Message-ID: From jimkruger at snf.stanford.edu Tue Sep 26 10:41:48 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 26 Sep 2006 10:41:48 -0700 Subject: Comment innotec SNF 2006-09-26 10:41:46: Intermittant crystal monitor OK? Message-ID: Gibby had reported poor behavior of the crystal monitor. When I replaced the crystal, I noticed flaking from the face of the crystal holder. With a litle pursuation, everything peeled back to what appeared to be a Cu layer. I surmise that the flaking was due to the weak oxide formed on Cu when open to the air. If the Cu to Oxide interface fails, overlayers will peel. I suggest that the crystal and holder be replaced after each deposition of materials with mechanically weak oxides like Cu. jim From jhaydon at snf.stanford.edu Wed Sep 27 08:56:25 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 27 Sep 2006 08:56:25 -0700 Subject: Comment innotec SNF 2006-09-26 10:41:46: Intermittant crystal monitor OK? Message-ID: see jim krugers comment From jhaydon at snf.stanford.edu Wed Sep 27 08:58:48 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 27 Sep 2006 08:58:48 -0700 Subject: Problem innotec SNF 2006-09-26 06:16:28: Crystal Health Monitor Erratic Message-ID: crystal monitor failure probably do to poor adhesion to crystal