Problem innotec SNF 2007-08-13 18:14:13: Wafer shards beneath crucible stage
mihirt at snf.stanford.edu
mihirt at snf.stanford.edu
Mon Aug 13 18:14:14 PDT 2007
There appear to be wafer shards beneath the crucible platform. They don't appear to be serious, but I could not remove them with tweezers or with the vacuum.
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