Shutdown innotec SNF 2007-08-20 07:49:43: Down for the Cryo pump exchange
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Mon Aug 20 07:49:44 PDT 2007
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Problem innotec SNF 2007-08-20 00:46:04: cryo got loud at end of deposition
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Shutdown innotec SNF 2007-08-20 07:49:43: Down for the Cryo pump exchange
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