From mitsuru at snf.stanford.edu Tue Jul 3 23:37:16 2007 From: mitsuru at snf.stanford.edu (mitsuru at snf.stanford.edu) Date: Tue, 3 Jul 2007 23:37:16 -0700 Subject: Comment innotec SNF 2007-07-03 23:37:15: Pt target Message-ID: In my process, I made Pt target splattring once. I ramped up the power so slowly that rapid heating cannot be the cause of the splatter. Target itself is still OK, I think. From jperez at snf.stanford.edu Thu Jul 5 11:42:26 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Jul 2007 11:42:26 -0700 Subject: Comment innotec SNF 2007-07-03 23:37:15: Pt target Message-ID: Pt when heating up likes to spatter. Walk ebeam around and slowly bring power up. Dimple on Pt source was too close to the front of crucible. If not in the center, user will be disqualified. From josephchen at snf.stanford.edu Thu Jul 5 16:21:02 2007 From: josephchen at snf.stanford.edu (josephchen at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:21:02 -0700 Subject: Comment innotec SNF 2007-07-05 16:20:54: Al target deformation Message-ID: 2 big holes appear on the ege of Al target. I've filled several pellets inside. Will report the result on the log book. From jperez at snf.stanford.edu Fri Jul 6 07:07:10 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:07:10 -0700 Subject: Problem innotec SNF 2007-06-29 15:07:05: Film infront of polarized window you can see that it is unravalling. Message-ID: Changing status from problem to comment. Jim Haydon will correct the problem on Monday. From jperez at snf.stanford.edu Fri Jul 6 07:08:26 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:08:26 -0700 Subject: Comment innotec SNF 2007-07-05 16:20:54: Al target deformation Message-ID: I show dimple from last user in front of starter source. Just add pellets. From jperez at snf.stanford.edu Fri Jul 6 07:09:33 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:09:33 -0700 Subject: Problem innotec SNF 2007-06-29 14:50:58: Pt starter source is small, add pellets before using Message-ID: Please add pellets when using Pt starter source each time your going to use this metal. From jperez at snf.stanford.edu Fri Jul 6 07:09:58 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:09:58 -0700 Subject: Comment innotec SNF 2007-05-31 14:22:55: Coating with 1000A of Alum Message-ID: completed. From jperez at snf.stanford.edu Fri Jul 6 07:10:43 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:10:43 -0700 Subject: Comment innotec SNF 2007-06-05 17:12:38: Pt target questionable Message-ID: This starter source was removed and built another Pt starter source. From jperez at snf.stanford.edu Fri Jul 6 07:11:15 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:11:15 -0700 Subject: Comment innotec SNF 2007-06-29 07:39:33: Pt target is not ready Message-ID: OK to use new Pt built starter source. From jperez at snf.stanford.edu Fri Jul 6 07:12:22 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:12:22 -0700 Subject: Comment innotec SNF 2007-06-15 12:43:38: don't tighten polarizing glass window while warm Message-ID: Thanks From jperez at snf.stanford.edu Fri Jul 6 07:14:31 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:14:31 -0700 Subject: Comment innotec SNF 2007-06-29 15:07:55: Hearth making noise when rotating Message-ID: Jim Haydon doesn't believe it's a problem. OK to continue using. From jperez at snf.stanford.edu Fri Jul 6 07:15:14 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:15:14 -0700 Subject: Comment innotec SNF 2007-07-06 07:15:14: Film in front of polarized window will be looked at on Maonday July 9th Message-ID: From jperez at snf.stanford.edu Fri Jul 6 09:13:17 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Jul 2007 09:13:17 -0700 Subject: Comment innotec SNF 2007-07-06 07:15:14: Film in front of polarized window will be looked at on Maonday July 9th Message-ID: Jim had a chance to look at the film, OK to use, but some users are turning the film the wrong way. There is an arrow on the film knob that shows you which way to turn the knob (clockwise ->). From gyzhang at snf.stanford.edu Sat Jul 7 23:53:12 2007 From: gyzhang at snf.stanford.edu (gyzhang at snf.stanford.edu) Date: Sat, 7 Jul 2007 23:53:12 -0700 Subject: Problem innotec SNF 2007-07-07 23:53:11: filement seems to be dead Message-ID: The "PWR up" button was stuncked when increasing the power up to 10%, and it all the way up to 100%. When i noticed that (i heard two beeps), i aborted at once. But the filement seems to be dead, because no current appear when i increase the power at second time. From jperez at snf.stanford.edu Mon Jul 9 14:38:13 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jul 2007 14:38:13 -0700 Subject: Shutdown innotec SNF 2007-07-09 14:38:13: Had power up to 6% with kilovolts at 10.06 and Amperes not moving at all. Message-ID: From emyers at snf.stanford.edu Mon Jul 9 16:37:08 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 9 Jul 2007 16:37:08 -0700 Subject: Comment innotec SNF 2007-07-09 16:37:07: Gun Failed Message-ID: The gun has failed. This will take a number of days to repair. We will have more information later in the week. From jperez at snf.stanford.edu Fri Jul 13 13:51:07 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 13:51:07 -0700 Subject: Comment innotec SNF 2007-07-09 16:37:07: Gun Failed Message-ID: Copper wires melted, Jim H. replaced E-gun and cleaned up mess. From jperez at snf.stanford.edu Fri Jul 13 13:52:30 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 13:52:30 -0700 Subject: Shutdown innotec SNF 2007-07-09 14:38:13: Had power up to 6% with kilovolts at 10.06 and Amperes not moving at all. Message-ID: Jim H. replace E-gun. Be careful when bring up ebeam. May be slighly different then before. From jperez at snf.stanford.edu Fri Jul 13 13:57:58 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 13:57:58 -0700 Subject: Problem innotec SNF 2007-07-07 23:53:11: filement seems to be dead Message-ID: The filament was OK, the copper wiring was melted and had to replace a different E-gun. From jperez at snf.stanford.edu Fri Jul 13 14:00:48 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 14:00:48 -0700 Subject: Problem innotec SNF 2007-07-13 14:00:45: You need to pay extra attention when bring up E- beam Message-ID: New E-gun, so take it slow when bring up power. All e-beam dimples must be in the center come Monday. From jperez at snf.stanford.edu Fri Jul 13 14:02:11 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 14:02:11 -0700 Subject: Problem innotec SNF 2007-07-13 14:00:45: You need to pay extra attention when bring up E- beam Message-ID: did not go yellow on coral with this problem. I'll try it again. From jperez at snf.stanford.edu Fri Jul 13 14:03:50 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 14:03:50 -0700 Subject: Problem innotec SNF 2007-07-13 14:03:50: New E-gun, take it slow when bring up power Message-ID: System may behave a little differently, so take it slow. Come Monday all e-beam dimples must be in the center of each starter source. From josephchen at snf.stanford.edu Sat Jul 14 10:26:30 2007 From: josephchen at snf.stanford.edu (josephchen at snf.stanford.edu) Date: Sat, 14 Jul 2007 10:26:30 -0700 Subject: Problem innotec SNF 2007-07-14 10:26:28: MDC aborted cryopump temp jump to 20k suddenly Message-ID: I'm very sorry for this bad news. This morning I finshed 2 successful depositions, power was manually increased slowly. But in my 3rd deposition, on my way of increasing the power to 7.6%, the TT-10/15 power supply control suddenly went off. The cryo pump temp jump to 21k immediately but cooled down to quickly 14k now. Don't know the reason and if there is anything wrong. From tdo at snf.stanford.edu Sun Jul 15 13:42:42 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 15 Jul 2007 13:42:42 -0700 Subject: Problem innotec SNF 2007-07-15 13:42:42: planetary motion and beam center Message-ID: Planetary is beginning to stick more. It does not rotate smoothly, but will slow down and speed up. When the joystick for the e-beam is indicating center position, the beam spot is not in the crucible, but too far back. Need to watch this when first increasing the power on the first dep layer in order to position the beam properly. Other than that, my 3-layer Ti/Pt/Au deposition went normally. Power levels were very similar to those used with the previous e-gun. From jhaydon at snf.stanford.edu Mon Jul 16 08:33:17 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 16 Jul 2007 08:33:17 -0700 Subject: Problem innotec SNF 2007-07-14 10:26:28: MDC aborted cryopump temp jump to 20k suddenly Message-ID: cryo over temperature most likely shut off high voltage don't know what caused it but will keep an eye on it From jhaydon at snf.stanford.edu Mon Jul 16 10:27:14 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 16 Jul 2007 10:27:14 -0700 Subject: Problem innotec SNF 2007-07-15 13:42:42: planetary motion and beam center Message-ID: drive was off center mounting plate had moved From rcordova at snf.stanford.edu Tue Jul 17 09:48:04 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 17 Jul 2007 09:48:04 -0700 Subject: Problem innotec SNF 2007-07-17 09:48:04: Dep rate dropped to 0 during deposit Message-ID: While power was at 4.0, my dep rate was 1.3/a until it reached 33a. Then dep rate went to zero and no added thickness to the 33a. I closed shutter after fifteen more seconds (I need 50a) and brought power down to zero. I then notices the "crystal failure" which I did not see when the dep rate dropped. From rcordova at snf.stanford.edu Tue Jul 17 10:04:07 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:04:07 -0700 Subject: Comment innotec SNF 2007-07-17 10:04:07: Crystal failure.. Message-ID: After I stopped brought the power down to zero, I see crystal failure. I changed the crystal and error still shows. Jim Haydon is checking system out From jhaydon at snf.stanford.edu Tue Jul 17 10:44:47 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Jul 2007 10:44:47 -0700 Subject: Problem innotec SNF 2007-07-17 10:44:46: thickness monitor not working Message-ID: You can still deposit by time and power but with the new gun the dep rate might be a little different From jhaydon at snf.stanford.edu Tue Jul 17 15:10:32 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Jul 2007 15:10:32 -0700 Subject: Problem innotec SNF 2007-07-17 10:44:46: thickness monitor not working Message-ID: monitor is now working there was a part missing from the crystal holder. It is possible that there still may be a problem since the original failure was probably caused by some other problem From jimkruger at snf.stanford.edu Tue Jul 17 16:59:03 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 17 Jul 2007 16:59:03 -0700 Subject: Comment innotec SNF 2007-07-17 16:59:02: Crystal monitor seems OK Message-ID: I replaced the crystal and Eric found a loose connector. Al dep was well behaved. From jhaydon at snf.stanford.edu Wed Jul 18 07:30:21 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Jul 2007 07:30:21 -0700 Subject: Problem innotec SNF 2007-07-17 09:48:04: Dep rate dropped to 0 during deposit Message-ID: crystal has been replaced From jperez at snf.stanford.edu Wed Jul 18 11:31:30 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 18 Jul 2007 11:31:30 -0700 Subject: Comment innotec SNF 2007-07-17 16:59:02: Crystal monitor seems OK Message-ID: I also changed lid and holder. From jperez at snf.stanford.edu Wed Jul 18 11:33:18 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 18 Jul 2007 11:33:18 -0700 Subject: Comment innotec SNF 2007-07-17 10:04:07: Crystal failure.. Message-ID: Crystal lid wasn't put back (was left out) when installed in the Innotec. From jperez at snf.stanford.edu Thu Jul 19 11:48:04 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Jul 2007 11:48:04 -0700 Subject: Problem innotec SNF 2007-07-19 11:48:03: Abort button on the Remoto isn't working. Message-ID: Use red pad on Maxtex. From sdogbe at snf.stanford.edu Tue Jul 24 22:39:20 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Tue, 24 Jul 2007 22:39:20 -0700 Subject: Problem innotec SNF 2007-07-24 22:39:19: Pump problem Message-ID: Chamber not pumping down. From jimkruger at snf.stanford.edu Tue Jul 24 22:48:15 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 24 Jul 2007 22:48:15 -0700 Subject: Comment innotec SNF 2007-07-24 22:48:15: Pumpdown problem cause Message-ID: I had a similar issue. The cable powering the plantary drive motor is kinked and likely to twist under the edge of the belljar when closing. Raise the belljar an inch or 2, pull out the cable, re-close and pumpdown. From ericp at snf.stanford.edu Tue Jul 24 22:49:08 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 24 Jul 2007 22:49:08 -0700 Subject: Comment innotec SNF 2007-07-24 22:49:07: Innotec pumping Message-ID: McVittie reset the roughing pump. Pumping ok now. From gyzhang at snf.stanford.edu Wed Jul 25 15:16:22 2007 From: gyzhang at snf.stanford.edu (gyzhang at snf.stanford.edu) Date: Wed, 25 Jul 2007 15:16:22 -0700 Subject: Problem innotec SNF 2007-07-25 15:16:22: Ti peletes used up Message-ID: The previous Ti target was too big and will stunck when rotating the crucible. A new target was formed using the peletes left. From maurice at snf.stanford.edu Wed Jul 25 16:55:45 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jul 2007 16:55:45 -0700 Subject: Problem innotec SNF 2007-07-25 15:16:22: Ti peletes used up Message-ID: More pellets added to the box From maurice at snf.stanford.edu Wed Jul 25 16:56:50 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Jul 2007 16:56:50 -0700 Subject: Problem innotec SNF 2007-07-24 22:39:19: Pump problem Message-ID: cord removed lid lowered pump reset From rcordova at snf.stanford.edu Thu Jul 26 09:48:36 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 26 Jul 2007 09:48:36 -0700 Subject: Comment innotec SNF 2007-07-26 09:48:35: Shutter response is slow Message-ID: Open and close of shutter is very slow to respond. From jperez at snf.stanford.edu Fri Jul 27 06:57:07 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2007 06:57:07 -0700 Subject: Comment innotec SNF 2007-07-24 22:49:07: Innotec pumping Message-ID: OK after Mc Vitte reset roughing pump. From jperez at snf.stanford.edu Fri Jul 27 07:53:09 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2007 07:53:09 -0700 Subject: Comment innotec SNF 2007-07-24 22:48:15: Pumpdown problem cause Message-ID: Everyone has been trained to check the back of the bell jar to make sure it isn't raised prior to pumping down the system. Everyone has been trained to stay at the Innotec to make sure the pumps cross over. From mtang at snf.stanford.edu Fri Jul 27 09:22:13 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 27 Jul 2007 09:22:13 -0700 Subject: Comment innotec SNF 2007-07-26 09:48:35: Shutter response is slow Message-ID: Please follow the standard training procedure: power down the source first and then close the shutter. (as per Jim, Ed, and Maurice) From htn80 at snf.stanford.edu Sun Jul 29 16:28:57 2007 From: htn80 at snf.stanford.edu (htn80 at snf.stanford.edu) Date: Sun, 29 Jul 2007 16:28:57 -0700 Subject: Problem innotec SNF 2007-07-29 16:28:57: Roughing Pump not working Message-ID: Roughing pump is not working (no high sound when activatingpump only mode). Yellow ATM light does not go off and there is no change in the pressure reading. Tried to pump down twice with no improvement. From jperez at snf.stanford.edu Mon Jul 30 09:00:24 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Jul 2007 09:00:24 -0700 Subject: Problem innotec SNF 2007-07-29 16:28:57: Roughing Pump not working Message-ID: Jim Hayden reset the pump in the basement. and crossed over at 150 mT. From zhangdw at snf.stanford.edu Mon Jul 30 22:09:05 2007 From: zhangdw at snf.stanford.edu (zhangdw at snf.stanford.edu) Date: Mon, 30 Jul 2007 22:09:05 -0700 Subject: Problem innotec SNF 2007-07-30 22:09:05: source1 can't be turned on Message-ID: after the reset interlock is pressed, the source 1cannot be turned on in the local mode. From dkozak at snf.stanford.edu Tue Jul 31 01:16:31 2007 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 31 Jul 2007 01:16:31 -0700 Subject: Problem innotec SNF 2007-07-31 01:16:31: Vacuum loss and crystal Message-ID: It seems that target exploded on some user previous to dejia. The following problems occured: when starting the planetary after pumpdown, the pressure jumped up. Had to pump down for additional time. Crystal health was 88%, but the process screen read "crystal failure", dejia could not acsertain deposition rate. Replaced the crystal, seems OK