From ryanb at snf.stanford.edu Sat May 12 15:13:47 2007 From: ryanb at snf.stanford.edu (ryanb at snf.stanford.edu) Date: Sat, 12 May 2007 15:13:47 -0700 Subject: Problem innotec SNF 2007-05-12 15:13:45: double sided tape Message-ID: the black double sided tape is missing, needs to be replaced. From giulia at snf.stanford.edu Sun May 13 16:09:44 2007 From: giulia at snf.stanford.edu (giulia at snf.stanford.edu) Date: Sun, 13 May 2007 16:09:44 -0700 Subject: Problem innotec SNF 2007-05-13 16:09:44: no deposition Message-ID: I couldn't get any deposition. When I pressed the High Voltage button ON, the Kilovolts meter was reading values between +-4 and +-1, and was jumping around these values continously. Usually it is very stable at about -10. I tried to increase the power, but I couldn't see any e-beam. I increased the power more and more (up to 4% for Cr) but nothing happened. I couldn't get any deposition and just unloaded my wafers. From jhaydon at snf.stanford.edu Mon May 14 08:27:42 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 14 May 2007 08:27:42 -0700 Subject: Problem innotec SNF 2007-05-13 16:09:44: no deposition Message-ID: problem could not be duplicated probably operator error From jperez at snf.stanford.edu Mon May 14 08:59:16 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 May 2007 08:59:16 -0700 Subject: Problem innotec SNF 2007-05-12 15:13:45: double sided tape Message-ID: Having the carbon double sided tape is a courtsey of SNF, please return it! From yuhykr at snf.stanford.edu Thu May 17 00:58:45 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Thu, 17 May 2007 00:58:45 -0700 Subject: Problem innotec SNF 2007-05-17 00:58:44: High Voltage gauge doesn't rise Message-ID: From jhaydon at snf.stanford.edu Thu May 17 08:36:02 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 17 May 2007 08:36:02 -0700 Subject: Problem innotec SNF 2007-05-17 00:58:44: High Voltage gauge doesn't rise Message-ID: high voltage is working probably operator error From jperez at snf.stanford.edu Fri May 18 12:05:26 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 May 2007 12:05:26 -0700 Subject: Comment innotec SNF 2007-05-18 12:05:25: Temperature at 16K, but when vented drops back down Message-ID: Watch temperature, but keep using as long as it does go any higher. From jperez at snf.stanford.edu Fri May 18 14:45:34 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 May 2007 14:45:34 -0700 Subject: Problem innotec SNF 2007-05-18 14:45:34: see comment on Temperature at 16 K Message-ID: When system is vented the temperature drops to 12 or 13 degrees. OK to use as long as you don't see it climbing upi in the 20s. Once it starts climbing into the upper 20s it'll keep going into the hundreds and will need a regen. From raneeyoo at snf.stanford.edu Sat May 19 08:29:24 2007 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sat, 19 May 2007 08:29:24 -0700 Subject: Comment innotec SNF 2007-05-19 08:29:23: no mirror Message-ID: From eunji at snf.stanford.edu Sat May 19 11:43:27 2007 From: eunji at snf.stanford.edu (eunji at snf.stanford.edu) Date: Sat, 19 May 2007 11:43:27 -0700 Subject: Problem innotec SNF 2007-05-19 11:43:27: gold target is stuck in c5 Message-ID: gold target was in weird shape, so i had to push it down to the crucible. after the deposition, i couldn't take it out. c5 is only for gold. so you will not have any problem with deposition. anyway, so sorry for any inconvenience! From jimkruger at snf.stanford.edu Mon May 21 10:12:10 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 21 May 2007 10:12:10 -0700 Subject: Problem innotec SNF 2007-05-21 10:12:10: Planetary flaking badly Message-ID: Also shutter. Replaced shutter. Will use plantary one last time, should be replaced soon. I was able to remove Au slug. Will remelt today. From jperez at snf.stanford.edu Fri May 25 14:12:00 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:12:00 -0700 Subject: Problem innotec SNF 2007-05-19 11:43:27: gold target is stuck in c5 Message-ID: I restructured the Gold starter source today. Hopefully it will come out eaiser. From jperez at snf.stanford.edu Fri May 25 14:12:36 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:12:36 -0700 Subject: Comment innotec SNF 2007-05-19 08:29:23: no mirror Message-ID: I replaced the broke mirror. From jhaydon at snf.stanford.edu Tue May 29 08:04:33 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 29 May 2007 08:04:33 -0700 Subject: Comment innotec SNF 2007-05-29 08:04:33: I will change the shielding as soon as it gets here Message-ID: From jperez at snf.stanford.edu Tue May 29 10:11:28 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 10:11:28 -0700 Subject: Shutdown innotec SNF 2007-05-29 10:11:28: Regen, will be up this evening. Message-ID: From jhaydon at snf.stanford.edu Wed May 30 08:12:07 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 May 2007 08:12:07 -0700 Subject: Shutdown innotec SNF 2007-05-29 10:11:28: Regen, will be up this evening. Message-ID: regen completed ok to use From jhaydon at snf.stanford.edu Wed May 30 08:13:14 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 May 2007 08:13:14 -0700 Subject: Comment innotec SNF 2007-05-18 12:05:25: Temperature at 16K, but when vented drops back down Message-ID: cryo has been regend From jhaydon at snf.stanford.edu Wed May 30 08:13:23 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 May 2007 08:13:23 -0700 Subject: Problem innotec SNF 2007-05-18 14:45:34: see comment on Temperature at 16 K Message-ID: From jperez at snf.stanford.edu Thu May 31 07:18:07 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 07:18:07 -0700 Subject: Shutdown innotec SNF 2007-05-31 07:18:06: Down for chamber clean Message-ID: Will be up late this evening. From jperez at snf.stanford.edu Thu May 31 14:19:12 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 14:19:12 -0700 Subject: Shutdown innotec SNF 2007-05-31 07:18:06: Down for chamber clean Message-ID: Chamber has been cleaned and dirty parts replaced. Ready to coat with Al. From jperez at snf.stanford.edu Thu May 31 14:19:51 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 14:19:51 -0700 Subject: Comment innotec SNF 2007-05-29 08:04:33: I will change the shielding as soon as it gets here Message-ID: Ready to coat chamber after clean From jperez at snf.stanford.edu Thu May 31 14:21:03 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 14:21:03 -0700 Subject: Problem innotec SNF 2007-05-21 10:12:10: Planetary flaking badly Message-ID: Replaced all dirty parts with clean parts and new dummy wafers. From jperez at snf.stanford.edu Thu May 31 14:22:55 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2007 14:22:55 -0700 Subject: Comment innotec SNF 2007-05-31 14:22:55: Coating with 1000A of Alum Message-ID: