Problem innotec SNF 2007-11-07 20:39:29: Hi-Vac Pump Not Working

jennyhu at snf.stanford.edu jennyhu at snf.stanford.edu
Wed Nov 7 20:39:29 PST 2007


Hi-Vac pump turned on after roughing pump, but stopped midway so it did not pump down past 1e-5 torr.  "MDC Abort" Error showed up.  Hi-Vac pump will not turn back on.




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