From jhaydon at snf.stanford.edu Mon Oct 1 07:55:20 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 1 Oct 2007 07:55:20 -0700 Subject: Problem innotec SNF 2007-09-29 17:23:49: Roughing Pump Message-ID: pump has been restarted From jperez at snf.stanford.edu Thu Oct 4 08:20:03 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Oct 2007 08:20:03 -0700 Subject: Comment innotec SNF 2007-10-04 08:20:02: The Cryo Temp is reading 16 K OK to use Message-ID: Jim is looking into the temperature reading. This is a new pump and has never gone down to 11 K after a regen. Temperature reads high after regen (15K). From dasgupta at snf.stanford.edu Sun Oct 7 23:20:50 2007 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Sun, 7 Oct 2007 23:20:50 -0700 Subject: Problem innotec SNF 2007-10-07 23:20:49: High cryo T and Pressure Message-ID: When I arrived at innotec, it had been pumping almost 2 hours and cryopump temp was 19K with pressure 6e-7. I pumped down for 3 hours and base pressure was barely below 5e-7, and temp was still 19K. As I deposited material, pressure steadily rose, sometimes above 1e-6 and I had to wait a long time for pressure to return to desired levels. From jperez at snf.stanford.edu Mon Oct 8 11:57:51 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Oct 2007 11:57:51 -0700 Subject: Shutdown innotec SNF 2007-10-08 11:57:48: Innotec in Regen Message-ID: Should be up this afternoon if all goes well with the regen. From jhaydon at snf.stanford.edu Tue Oct 9 07:23:57 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 9 Oct 2007 07:23:57 -0700 Subject: Shutdown innotec SNF 2007-10-08 11:57:48: Innotec in Regen Message-ID: regen completed ok to use From jhaydon at snf.stanford.edu Tue Oct 9 07:24:23 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 9 Oct 2007 07:24:23 -0700 Subject: Problem innotec SNF 2007-10-07 23:20:49: High cryo T and Pressure Message-ID: cryo pump has been regened From jhaydon at snf.stanford.edu Tue Oct 9 07:24:40 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 9 Oct 2007 07:24:40 -0700 Subject: Comment innotec SNF 2007-10-04 08:20:02: The Cryo Temp is reading 16 K OK to use Message-ID: cryo pump has been regened From pganesan at snf.stanford.edu Wed Oct 10 00:18:45 2007 From: pganesan at snf.stanford.edu (pganesan at snf.stanford.edu) Date: Wed, 10 Oct 2007 00:18:45 -0700 Subject: Comment innotec SNF 2007-10-10 00:18:45: not enough dummy wafers Message-ID: one slot on planetary is empty. please fill with your sample or a fresh dummy. From jperez at snf.stanford.edu Thu Oct 11 07:13:30 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Oct 2007 07:13:30 -0700 Subject: Comment innotec SNF 2007-10-10 00:18:45: not enough dummy wafers Message-ID: There are no excuses, I have two boxes of baffle/ dummy wafers underneath the Innotec table. It's everyones (Innotec users) responsibility to support the area and tool, running with the highest quality. From jimkruger at snf.stanford.edu Thu Oct 11 12:17:40 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 11 Oct 2007 12:17:40 -0700 Subject: Comment innotec SNF 2007-10-11 12:17:39: Pressure/cryo-temp excursion Message-ID: about 10% into my Al dep, the cryo temp went up, the pressure went up and the interlocks shut down. I re-started "pump only" and everything went back to normal. I was able to finish. From jperez at snf.stanford.edu Mon Oct 15 07:19:22 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Oct 2007 07:19:22 -0700 Subject: Comment innotec SNF 2007-10-11 12:17:39: Pressure/cryo-temp excursion Message-ID: I pulled the smaller starter Source (Aluminum). I am waiting for the new hearth to come in. This was a thick deposition. New hearth should be this week. From yuhykr at snf.stanford.edu Tue Oct 16 21:01:29 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 16 Oct 2007 21:01:29 -0700 Subject: Shutdown innotec SNF 2007-10-16 21:01:28: ATM light doesn't go out Message-ID: From jhaydon at snf.stanford.edu Wed Oct 17 09:55:06 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 17 Oct 2007 09:55:06 -0700 Subject: Shutdown innotec SNF 2007-10-16 21:01:28: ATM light doesn't go out Message-ID: cable was stuck under the chamber preventing it from closingthis should have been checked before pump down From zhangy at snf.stanford.edu Wed Oct 17 20:23:59 2007 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Wed, 17 Oct 2007 20:23:59 -0700 Subject: Shutdown innotec SNF 2007-10-17 20:23:59: pump shutdown by interlock Message-ID: From zhangy at snf.stanford.edu Wed Oct 17 20:36:22 2007 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Wed, 17 Oct 2007 20:36:22 -0700 Subject: Problem innotec SNF 2007-10-17 20:36:21: pump shutdown by interlock Message-ID: When I lowered the chamber after loading samples, there's a cable at the back of the chamber which stuck in between the bell jars. I didn't notice that until start pumping. As a result, the ATM light didn't go off in 10seconds, and I didn't stop pumping immediately. I really appologize for this. Therefore, the interlock shut down the roughing pump. By the way, this same problem happened two days ago. Would you please fix the cable problem as well? Thanks a lot! From jhaydon at snf.stanford.edu Thu Oct 18 08:13:45 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 18 Oct 2007 08:13:45 -0700 Subject: Shutdown innotec SNF 2007-10-17 20:23:59: pump shutdown by interlock Message-ID: pump has been restarted From jhaydon at snf.stanford.edu Thu Oct 18 08:15:13 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 18 Oct 2007 08:15:13 -0700 Subject: Problem innotec SNF 2007-10-17 20:36:21: pump shutdown by interlock Message-ID: cables has been attached to water line hose hope fully this will fix this problem From nppatil at snf.stanford.edu Thu Oct 18 22:20:46 2007 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Thu, 18 Oct 2007 22:20:46 -0700 Subject: Problem innotec SNF 2007-10-18 22:20:45: Interlock WFS1 & No Emission Current Message-ID: I wanted to deposit 45 nm of Au. After 31 nm of Au the WFS1 interlock turned on and turned the e-gun off. I vented and removed my wafers. Eric P. adjusted the WFS1 interlock connector at the back of the Innotec and the Interlock error went away. During my second run, there was no emission current (HV: 10kV) with power @ 6% with Ti target. There is no WFS1 error now but still no emission current. From jperez at snf.stanford.edu Fri Oct 19 11:05:49 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Oct 2007 11:05:49 -0700 Subject: Shutdown innotec SNF 2007-10-19 11:05:48: Check the chiller in the basement and OK Message-ID: No errors on the VSC screen., but still no emission . Remote bring power up on display, but D.C. amps or D.C. Kilovolts not changing. From jperez at snf.stanford.edu Fri Oct 19 14:22:23 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Oct 2007 14:22:23 -0700 Subject: Shutdown innotec SNF 2007-10-19 11:05:48: Check the chiller in the basement and OK Message-ID: Elmer changed filament and we now have an e-beam. From jperez at snf.stanford.edu Fri Oct 19 14:22:46 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Oct 2007 14:22:46 -0700 Subject: Problem innotec SNF 2007-10-18 22:20:45: Interlock WFS1 & No Emission Current Message-ID: Filament changed, OK now. From jimkruger at snf.stanford.edu Mon Oct 22 14:01:44 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 22 Oct 2007 14:01:44 -0700 Subject: Problem innotec SNF 2007-10-22 14:01:44: Innotec not pumping Message-ID: Roughing pump needs re-set? From jimkruger at snf.stanford.edu Mon Oct 22 14:07:29 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 22 Oct 2007 14:07:29 -0700 Subject: Shutdown innotec SNF 2007-10-22 14:07:28: Roughing pump quit? Message-ID: From maurice at snf.stanford.edu Mon Oct 22 14:23:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Oct 2007 14:23:02 -0700 Subject: Shutdown innotec SNF 2007-10-22 14:07:28: Roughing pump quit? Message-ID: Checked belljar...reset pump From maurice at snf.stanford.edu Mon Oct 22 14:23:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Oct 2007 14:23:21 -0700 Subject: Problem innotec SNF 2007-10-22 14:01:44: Innotec not pumping Message-ID: pump reset From rcordova at snf.stanford.edu Fri Oct 26 11:53:55 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 26 Oct 2007 11:53:55 -0700 Subject: Problem innotec SNF 2007-10-26 11:53:53: film is not advancing in window. Message-ID: Very faint image in the window, as I ramped power up. Could not see the beam until I was at power of 4.0. Film does not seem to be advancing. I left a voicemail for Jim Haydon From rcordova at snf.stanford.edu Fri Oct 26 12:04:01 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 26 Oct 2007 12:04:01 -0700 Subject: Comment innotec SNF 2007-10-26 12:03:59: Jim checked it out... Message-ID: the polarizing wheel was on dark...My mistake not to check it! From maurice at snf.stanford.edu Fri Oct 26 13:12:32 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Oct 2007 13:12:32 -0700 Subject: Problem innotec SNF 2007-10-26 11:53:53: film is not advancing in window. Message-ID: the polarizing wheel was on dark From maurice at snf.stanford.edu Fri Oct 26 13:12:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Oct 2007 13:12:43 -0700 Subject: Comment innotec SNF 2007-10-26 12:03:59: Jim checked it out... Message-ID: logged From kocabas at snf.stanford.edu Fri Oct 26 16:41:40 2007 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Fri, 26 Oct 2007 16:41:40 -0700 Subject: Comment innotec SNF 2007-10-26 16:41:40: Changed shutter - where is the hose for vacuum? Message-ID: I changed the shutter. It was peeling pretty bad. I could not see the hose used for vacuuming. The chamber was ok, but if I needed to vacuum, I would have been in trouble. From alexalex at snf.stanford.edu Sun Oct 28 03:11:28 2007 From: alexalex at snf.stanford.edu (alexalex at snf.stanford.edu) Date: Sun, 28 Oct 2007 03:11:28 -0700 Subject: Problem innotec SNF 2007-10-28 03:11:27: I could not get the ATM light to go out in <30 sec Message-ID: I tried to clean the seal 7 times but I cannot get the light to go out when I pump down the chamber. I left the system in stop mode. From dejia at snf.stanford.edu Sun Oct 28 20:10:49 2007 From: dejia at snf.stanford.edu (dejia at snf.stanford.edu) Date: Sun, 28 Oct 2007 20:10:49 -0700 Subject: Problem innotec SNF 2007-10-28 20:10:49: pump is taking a long time Message-ID: cryo pump is taking unusuallu long time to reach base pressure. Longer than 2hrs. I and the user before me experienced this problem From maurice at snf.stanford.edu Wed Oct 31 15:21:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 31 Oct 2007 15:21:43 -0700 Subject: Problem innotec SNF 2007-10-28 03:11:27: I could not get the ATM light to go out in <30 sec Message-ID: pump restarted From maurice at snf.stanford.edu Wed Oct 31 15:22:18 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 31 Oct 2007 15:22:18 -0700 Subject: Comment innotec SNF 2007-10-31 15:22:17: Pt and Pd added to box Message-ID: