Problem innotec SNF 2007-10-18 22:20:45: Interlock WFS1 & No Emission Current

nppatil at snf.stanford.edu nppatil at snf.stanford.edu
Thu Oct 18 22:20:46 PDT 2007


I wanted to deposit 45 nm of Au. After 31 nm of Au the WFS1 interlock turned on and turned the e-gun off. I vented and removed my wafers. Eric P. adjusted the WFS1 interlock connector at the back of the Innotec and the Interlock error went away.
During my second run, there was no emission current (HV: 10kV) with power @ 6% with Ti target. There is no WFS1 error now but still no emission current.




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