Problem innotec SNF 2007-09-07 14:56:30: Vacuum hiccup

jliu at snf.stanford.edu jliu at snf.stanford.edu
Fri Sep 7 14:56:30 PDT 2007


The Innotec had a big vacuum hiccup while I started Ni deposition. The ion gauge was kicked off by a sudden pressure increase. The pumping cycle was resumed with only 1E-4 Torr to start with. The rest of the deposition was normal.




More information about the innotec-pcs mailing list