Problem innotec SNF 2007-09-07 14:56:30: Vacuum hiccup

jliu at jliu at
Fri Sep 7 14:56:30 PDT 2007

The Innotec had a big vacuum hiccup while I started Ni deposition. The ion gauge was kicked off by a sudden pressure increase. The pumping cycle was resumed with only 1E-4 Torr to start with. The rest of the deposition was normal.

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