Problem innotec SNF 2007-09-10 23:24:45: Interlock error

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Mon Sep 10 23:24:46 PDT 2007


After successful pump-down, tied to bring tool to deposition.
When pressed "reset" for interlocks, water light did not come on.  Message on screen:  interlock WFS1.  Could not clear, could not turn machine on.  




More information about the innotec-pcs mailing list