Problem innotec SNF 2008-01-28 15:57:46: Gus burst during turret rotation

jliu at snf.stanford.edu jliu at snf.stanford.edu
Mon Jan 28 15:58:01 PST 2008


During the turret rotation afte the Ti deposition, there appeard to be a gust burst in the chamber triggering off the Hi VAC gauge and the throttle valve. The cryopump temperature went up from 15K to 21K. After a few minutes, the cryopump temperature went down to 15K. Everything went back to normal.
James 




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