From dongrip at snf.stanford.edu Mon Jun 9 03:09:25 2008 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 9 Jun 2008 03:09:25 -0700 Subject: Shutdown innotec SNF 2008-06-09 03:09:24: dropped-off Au source into the hole by mistake Message-ID: When I tried to remove the Au source after the deposition, I dropped it off into the hole next to the crucible by mistake. I couldn't pick it up, so I shutdown Innotec. I'm really sorry for your inconvenience. From mferrier at snf.stanford.edu Mon Jun 9 06:08:52 2008 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Mon, 9 Jun 2008 06:08:52 -0700 Subject: Comment innotec SNF 2008-06-09 06:08:51: AU source removed -pumping down Message-ID: Removerd Au source easily Wait for staff to enable the tool again Chamber pumping down, wafers in the chamber From jperez at snf.stanford.edu Mon Jun 9 07:01:57 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jun 2008 07:01:57 -0700 Subject: Comment innotec SNF 2008-06-09 06:08:51: AU source removed -pumping down Message-ID: OK, Au has been retrieved. OK to use. From jperez at snf.stanford.edu Mon Jun 9 07:02:58 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jun 2008 07:02:58 -0700 Subject: Shutdown innotec SNF 2008-06-09 03:09:24: dropped-off Au source into the hole by mistake Message-ID: Au Starter source has been retrieved. OK to use. From jperez at snf.stanford.edu Mon Jun 9 07:07:32 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jun 2008 07:07:32 -0700 Subject: Problem innotec SNF 2008-04-21 13:21:34: high voltage failure Message-ID: We haven't seen this happen again since 4/21/02. Jim has done many changes to the system due to the oil back fill and looks like it took care of the burst of air that shut off the vac and Hi vac problem. From nxs4059 at snf.stanford.edu Wed Jun 18 15:29:19 2008 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Wed, 18 Jun 2008 15:29:19 -0700 Subject: Comment innotec SNF 2008-06-18 15:29:18: Dropped Dummy Wafer Message-ID: I dropped and broke a dummy wafer inside the innotec. I tried to clean up as well as I could with the vaccume but couldn't get some of the peices in the lower section. there are also appears to be peices from other wafers down there (in the back, I dropped in the front). From nxs4059 at snf.stanford.edu Wed Jun 18 15:42:54 2008 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Wed, 18 Jun 2008 15:42:54 -0700 Subject: Problem innotec SNF 2008-06-18 15:42:53: Dropped Dummy Wafer Message-ID: I dropped and broke a dummy wafer inside the innotec. I tried to clean up as well as I could with the vaccume but couldn't get some of the peices in the lower section. there are also appears to be peices from other wafers down there (in the back, I dropped in the front). From jhaydon at snf.stanford.edu Fri Jun 20 06:39:44 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 20 Jun 2008 06:39:44 -0700 Subject: Problem innotec SNF 2008-06-18 15:42:53: Dropped Dummy Wafer Message-ID: From jimkruger at snf.stanford.edu Thu Jun 26 17:45:37 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 26 Jun 2008 17:45:37 -0700 Subject: Problem innotec SNF 2008-06-26 17:45:35: walls starting to flake Message-ID: I vacuumed a lot, but it continues to flake. From jperez at snf.stanford.edu Fri Jun 27 07:22:32 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jun 2008 07:22:32 -0700 Subject: Comment innotec SNF 2008-06-18 15:29:18: Dropped Dummy Wafer Message-ID: Any pieces below the plate above the e-gun will be cleaned up when system goes down for a clean by maintenance. From dongrip at snf.stanford.edu Mon Jun 30 06:17:03 2008 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 30 Jun 2008 06:17:03 -0700 Subject: Problem innotec SNF 2008-06-30 06:17:03: high voltage problem Message-ID: High voltage reads 0.03 kV when it is turned on. thus, I didn't start the deposition, and removed the samples and the sources. The machine is now under being pumped down. From jperez at snf.stanford.edu Mon Jun 30 10:29:57 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Jun 2008 10:29:57 -0700 Subject: Shutdown innotec SNF 2008-06-30 10:29:56: No power from the power supply Message-ID: From jhaydon at snf.stanford.edu Mon Jun 30 11:50:20 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Jun 2008 11:50:20 -0700 Subject: Shutdown innotec SNF 2008-06-30 10:29:56: No power from the power supply Message-ID: gun shorted by a piece of metal film From jhaydon at snf.stanford.edu Mon Jun 30 11:51:00 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 30 Jun 2008 11:51:00 -0700 Subject: Problem innotec SNF 2008-06-30 06:17:03: high voltage problem Message-ID: gun was shorted by a piece of metal film From ccwan at snf.stanford.edu Mon Jun 30 21:57:07 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Mon, 30 Jun 2008 21:57:07 -0700 Subject: Problem innotec SNF 2008-06-30 21:57:07: Dep rate display Message-ID: Dep rate display fluctuated a lot while thickness display was showing corrent value. During deposition, both reading "froze" for about 5 seconds once and they went back to normal afterward. Not sure what the problem was.