Problem innotec SNF 2008-06-30 21:57:07: Dep rate display

ccwan at snf.stanford.edu ccwan at snf.stanford.edu
Mon Jun 30 21:57:07 PDT 2008


Dep rate display fluctuated a lot while thickness display was showing corrent value. During deposition, both reading "froze" for about 5 seconds once and they went back to normal afterward. Not sure what the problem was. 




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