Comment innotec SNF 2008-03-13 13:47:25: No spare dummy wafers; found flaking shutter

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Mar 13 13:47:25 PDT 2008


no spare dummy wafers.
I found heavy flaking locally only at the back wall of the shutter.  Vacuumed, scraped clean and replaced since was only the loone bad spot spot.  It looks like the shutter was mis- positioned during a warm-up or deposition.




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