From gcredo at snf.stanford.edu Sat Nov 1 02:59:05 2008 From: gcredo at snf.stanford.edu (gcredo at snf.stanford.edu) Date: Sat, 1 Nov 2008 02:59:05 -0700 Subject: Comment innotec SNF 2008-11-01 02:59:04: observations Message-ID: 1. C4 crucible white and crusty in places (before I used) - can't clean with vacuum 2. Au plug had dimple in front after I used it; thought I had evened it out, but apparently did not From haiwei at snf.stanford.edu Sun Nov 2 15:31:27 2008 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 2 Nov 2008 15:31:27 -0800 Subject: Comment innotec SNF 2008-11-02 15:31:26: particles are found in the e-beam slot Message-ID: The process was normal. Probably due to the unexpected sputtering during the deposition. From jperez at snf.stanford.edu Mon Nov 3 11:44:07 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 3 Nov 2008 11:44:07 -0800 Subject: Comment innotec SNF 2008-11-02 15:31:26: particles are found in the e-beam slot Message-ID: vacuum system, but no sur what e-beam slot is. From jperez at snf.stanford.edu Mon Nov 3 11:53:41 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 3 Nov 2008 11:53:41 -0800 Subject: Comment innotec SNF 2008-11-01 02:59:04: observations Message-ID: Use chisal on pockets to remove residuals and vacuum. Flash light in socket being charged. Look under table where vacuum hose goes through to vacuum port. spoke with the person that was too close to front of starter source. From jperez at snf.stanford.edu Mon Nov 3 11:54:48 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 3 Nov 2008 11:54:48 -0800 Subject: Comment innotec SNF 2008-10-31 23:05:39: 5:30am-9:30am Sat 11/1 free Message-ID: Get ahold of John Shott to see why you can't aways send out e-mail. From junjun at snf.stanford.edu Tue Nov 4 18:42:32 2008 From: junjun at snf.stanford.edu (junjun at snf.stanford.edu) Date: Tue, 4 Nov 2008 18:42:32 -0800 Subject: Problem innotec SNF 2008-11-04 18:42:31: bell jar makes screeching noise when closing Message-ID: From ryw at snf.stanford.edu Wed Nov 5 20:47:48 2008 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Wed, 5 Nov 2008 20:47:48 -0800 Subject: Problem innotec SNF 2008-11-05 20:47:47: planetary did not rotate Message-ID: From jhaydon at snf.stanford.edu Thu Nov 6 09:13:36 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 6 Nov 2008 09:13:36 -0800 Subject: Problem innotec SNF 2008-11-05 20:47:47: planetary did not rotate Message-ID: connector was disconnected From jhaydon at snf.stanford.edu Thu Nov 6 09:14:05 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 6 Nov 2008 09:14:05 -0800 Subject: Problem innotec SNF 2008-11-04 18:42:31: bell jar makes screeching noise when closing Message-ID: lubricated column From jimkruger at snf.stanford.edu Fri Nov 7 11:48:29 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 7 Nov 2008 11:48:29 -0800 Subject: Problem innotec SNF 2008-11-07 11:48:28: Crystal monitor stuck at 78%--maybe should red-light? Message-ID: New crystal (3 trys) makes no difference. Blue screen flashes "crystal failure" once you go through the material selection. Power off / on (with Maurice) makes no difference. It seems the System would be usable only with no monitor. From mrlin at snf.stanford.edu Fri Nov 7 12:44:08 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 7 Nov 2008 12:44:08 -0800 Subject: Comment innotec SNF 2008-11-07 12:44:08: crystal fixed Message-ID: Fixed, for now... New crystal holder swapped in; particular install procedure/method used, otherwise new holder still doesn't help. It's expected that the next person will run into the same problem when he/she changes the crystal unless they install it a particular way. It appears that the problem is not the holder, but rather there is bad contact between the appartus and the crystal "locking" thing. From hailiang at snf.stanford.edu Fri Nov 7 23:59:55 2008 From: hailiang at snf.stanford.edu (hailiang at snf.stanford.edu) Date: Fri, 7 Nov 2008 23:59:55 -0800 Subject: Problem innotec SNF 2008-11-07 23:59:54: bad beam focus? Message-ID: It took ~6% power to evaporate Ti at a rate of 0.2A/sec. The same happened to the previous user. From jperez at snf.stanford.edu Mon Nov 10 13:23:16 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Nov 2008 13:23:16 -0800 Subject: Problem innotec SNF 2008-11-07 11:48:28: Crystal monitor stuck at 78%--maybe should red-light? Message-ID: Crystal contact is working again. From jperez at snf.stanford.edu Mon Nov 10 13:24:16 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Nov 2008 13:24:16 -0800 Subject: Comment innotec SNF 2008-11-07 12:44:08: crystal fixed Message-ID: Crystal contact is working again. Jim will order a back-up. From jperez at snf.stanford.edu Thu Nov 13 07:45:17 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 13 Nov 2008 07:45:17 -0800 Subject: Problem innotec SNF 2008-11-07 23:59:54: bad beam focus? Message-ID: I ran Ti and with the power at 3.3 % and I got 0.5A/sec. When I loaded the starter source I had to put quite a few pellets to get the level up. Still could of used more pellets. From haiwei at snf.stanford.edu Mon Nov 17 23:59:02 2008 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Mon, 17 Nov 2008 23:59:02 -0800 Subject: Comment innotec SNF 2008-11-17 23:59:01: Dummy Slot broken Message-ID: One dummy slot is broken. From tdo at snf.stanford.edu Wed Nov 19 22:54:23 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 19 Nov 2008 22:54:23 -0800 Subject: Comment innotec SNF 2008-11-19 22:54:23: no more gold pellets Message-ID: used the last of the au pellets From maurice at snf.stanford.edu Thu Nov 20 15:58:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Nov 2008 15:58:46 -0800 Subject: Comment innotec SNF 2008-11-19 22:54:23: no more gold pellets Message-ID: more gold pellets added From gcredo at snf.stanford.edu Fri Nov 21 09:36:29 2008 From: gcredo at snf.stanford.edu (gcredo at snf.stanford.edu) Date: Fri, 21 Nov 2008 09:36:29 -0800 Subject: Comment innotec SNF 2008-11-21 09:36:28: Au source Message-ID: Before I started it was 'cup like' - thickness ok but most of edge was relatively high with partially melted chunks; added pellets to middle and attempted to level profile - it's better now but still a little raised on the edges From zhangy at snf.stanford.edu Fri Nov 21 17:00:46 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Fri, 21 Nov 2008 17:00:46 -0800 Subject: Problem innotec SNF 2008-11-21 17:00:45: Pt target damage Message-ID: Sorry that the Pt target got exploded during my deposition. Need to be rebuild. Many thanks. From jasonlin at snf.stanford.edu Fri Nov 21 22:35:45 2008 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 21 Nov 2008 22:35:45 -0800 Subject: Problem innotec SNF 2008-11-21 22:35:44: Source 1 "Water" light does not turn on Message-ID: On Step 22 of Deposition section, 7 lights should turn on. Only 6 turned on ("Water" light remains off). Also noticed a WFS1 interlock on the Master Console VSC. Stopped processing, removed wafers, and pumped down. From ericp at snf.stanford.edu Sat Nov 22 02:01:06 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 22 Nov 2008 02:01:06 -0800 Subject: Comment innotec SNF 2008-11-22 02:01:05: WFS error fixed. Message-ID: Should be ok to run.Believed to be a intermittent sensor, should be looked at for a permanent solution, but is ok to run at this moment. From popomoo at snf.stanford.edu Sat Nov 22 12:08:38 2008 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 22 Nov 2008 12:08:38 -0800 Subject: Problem innotec SNF 2008-11-22 12:08:38: something boiling?? Message-ID: I finished using it as uaual, except that I heard some noise, just llike, something was boiling, even when the power was turned off. From raneeyoo at snf.stanford.edu Sat Nov 22 13:14:59 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sat, 22 Nov 2008 13:14:59 -0800 Subject: Comment innotec SNF 2008-11-22 13:14:59: found a broken wafer piece Message-ID: I found a broken wafer piece and peelings inside chamber. I removed, vacuumed, and wiped down the chamber. Crucible C2, c5 and c6 have particles. They are cleaned too. From maurice at snf.stanford.edu Tue Nov 25 16:33:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Nov 2008 16:33:29 -0800 Subject: Shutdown innotec SNF 2008-11-25 16:33:29: Fuse blown in VSC Message-ID: fuse replaced system needs regen...will take about 4 hours From maurice at snf.stanford.edu Tue Nov 25 19:15:54 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Nov 2008 19:15:54 -0800 Subject: Shutdown innotec SNF 2008-11-25 16:33:29: Fuse blown in VSC Message-ID: regen should be done around 9pm From maurice at snf.stanford.edu Tue Nov 25 19:16:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Nov 2008 19:16:37 -0800 Subject: Problem innotec SNF 2008-11-25 19:16:36: regen should be done around 9pm Message-ID: From jhaydon at snf.stanford.edu Wed Nov 26 06:57:56 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Nov 2008 06:57:56 -0800 Subject: Problem innotec SNF 2008-11-25 19:16:36: regen should be done around 9pm Message-ID: regen completed From jimkruger at snf.stanford.edu Wed Nov 26 09:08:13 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 26 Nov 2008 09:08:13 -0800 Subject: Problem innotec SNF 2008-11-26 09:08:12: Film tape broken, widow coated, running blind Message-ID: I have an easy run which I can do with th shutter closed, but the viewing window needs cleaning and film tape replacing. From jhaydon at snf.stanford.edu Wed Nov 26 13:33:25 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Nov 2008 13:33:25 -0800 Subject: Problem innotec SNF 2008-11-26 09:08:12: Film tape broken, widow coated, running blind Message-ID: film was jammed it had been turned the wrong way From jhaydon at snf.stanford.edu Wed Nov 26 13:34:55 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Nov 2008 13:34:55 -0800 Subject: Problem innotec SNF 2008-11-22 12:08:38: something boiling?? Message-ID: Have not heard any bioling sounds chiller was working normally From jhaydon at snf.stanford.edu Wed Nov 26 15:01:47 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Nov 2008 15:01:47 -0800 Subject: Comment innotec SNF 2008-11-22 13:14:59: found a broken wafer piece Message-ID: thanks for cleaning it up From gcredo at snf.stanford.edu Sun Nov 30 09:13:12 2008 From: gcredo at snf.stanford.edu (gcredo at snf.stanford.edu) Date: Sun, 30 Nov 2008 09:13:12 -0800 Subject: Comment innotec SNF 2008-11-30 09:13:12: Au source - need pellets Message-ID: Size is OK for now, but need to refill pellet supply