Problem innotec SNF 2008-11-21 22:35:44: Source 1 "Water" light does not turn on

jasonlin at jasonlin at
Fri Nov 21 22:35:45 PST 2008

On Step 22 of Deposition section, 7 lights should turn on.  Only 6 turned on ("Water" light remains off). Also noticed a WFS1 interlock on the Master Console VSC.
Stopped processing, removed wafers, and pumped down.

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