Problem innotec SNF 2008-11-21 22:35:44: Source 1 "Water" light does not turn on

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Nov 21 22:35:45 PST 2008


On Step 22 of Deposition section, 7 lights should turn on.  Only 6 turned on ("Water" light remains off). Also noticed a WFS1 interlock on the Master Console VSC.
Stopped processing, removed wafers, and pumped down.




More information about the innotec-pcs mailing list