Comment innotec SNF 2008-11-22 13:14:59: found a broken wafer piece
raneeyoo at snf.stanford.edu
raneeyoo at snf.stanford.edu
Sat Nov 22 13:14:59 PST 2008
I found a broken wafer piece and peelings inside chamber. I removed, vacuumed, and wiped down the chamber. Crucible C2, c5 and c6 have particles. They are cleaned too.
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