Comment innotec SNF 2008-11-22 13:14:59: found a broken wafer piece

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Sat Nov 22 13:14:59 PST 2008


I found a broken wafer piece and peelings inside chamber.  I removed, vacuumed, and wiped down the chamber.  Crucible C2, c5 and c6 have particles.   They are cleaned too.




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