From ehe at snf.stanford.edu Mon Aug 3 09:20:40 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 3 Aug 2009 09:20:40 -0700 Subject: Comment innotec SNF 2009-08-03 09:20:40: no Pt pellets left Message-ID: From emyers at snf.stanford.edu Mon Aug 3 10:16:26 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Aug 2009 10:16:26 -0700 Subject: Comment innotec SNF 2009-07-31 19:33:55: need more gold pallets Message-ID: Added more gold pellets From emyers at snf.stanford.edu Mon Aug 3 10:16:42 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Aug 2009 10:16:42 -0700 Subject: Comment innotec SNF 2009-08-03 09:20:40: no Pt pellets left Message-ID: Added more Pt pellets From maurice at snf.stanford.edu Fri Aug 7 14:12:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Aug 2009 14:12:31 -0700 Subject: Comment innotec SNF 2009-08-07 14:12:30: gold added to box Message-ID: added 50 pellets to box From ghyrn at snf.stanford.edu Mon Aug 10 22:01:19 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Mon, 10 Aug 2009 22:01:19 -0700 Subject: Comment innotec SNF 2009-08-10 22:01:18: Power up button sticks Message-ID: Sometimes the button sticks for increasing power on the remote From ghyrn at snf.stanford.edu Tue Aug 11 09:57:00 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Tue, 11 Aug 2009 09:57:00 -0700 Subject: Comment innotec SNF 2009-08-11 09:57:00: Power up button stuck, ramped up quickly Message-ID: Was able to bring it back down before anything bad happened, but looks like we have a runaway throttle. done early, per previous email From takane at snf.stanford.edu Wed Aug 12 12:42:37 2009 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Wed, 12 Aug 2009 12:42:37 -0700 Subject: Problem innotec SNF 2009-08-12 12:42:37: cryo temp high? Message-ID: When I started out it was 16K; now it's up to 18K. Jim Kruger (before me) logged it went up from 15K to 18K. From jimkruger at yahoo.com Wed Aug 12 13:17:51 2009 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 12 Aug 2009 13:17:51 -0700 (PDT) Subject: Problem innotec SNF 2009-08-12 12:42:37: cryo temp high? In-Reply-To: <20090812194238.0C4E91A18A3@smtp3.stanford.edu> Message-ID: <600989.75351.qm@web38901.mail.mud.yahoo.com> I think it is OK if the vacuum stays good. It may be nearly time for a re-gen. jim --- On Wed, 8/12/09, takane at snf.stanford.edu wrote: > From: takane at snf.stanford.edu > Subject: Problem innotec SNF 2009-08-12 12:42:37: cryo temp high? > To: innotec-pcs at snf.stanford.edu > Date: Wednesday, August 12, 2009, 12:42 PM > When I started out it was 16K; now > it's up to 18K.? Jim Kruger (before me) logged it went > up from 15K to 18K. > > From jimkruger at snf.stanford.edu Thu Aug 13 14:16:01 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 13 Aug 2009 14:16:01 -0700 Subject: Problem innotec SNF 2009-08-13 14:16:00: Peeling, crystal failure Message-ID: I had peeling on one dummy wafer, peeled all the way back to the Al surface. My wafers and the other dummys were OK. Some peelig on the planetary as well as on the pump port shield. I replaced the port shield. Crystal failure appears to be from peeling of hte Crystal holder. I finished my deposition blind, by time. Vacuumed the flakes. I installed the last clean Crystal holder, no spare remains. The peeling may have occured during my Ni deposition so the Ni source may be contaminated. jim From jprovine at snf.stanford.edu Fri Aug 14 08:05:25 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 14 Aug 2009 08:05:25 -0700 Subject: Comment innotec SNF 2009-08-14 08:05:24: cryo temp stable at 15K throughout run Message-ID: From narii at snf.stanford.edu Sat Aug 15 04:05:16 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 15 Aug 2009 04:05:16 -0700 Subject: Comment innotec SNF 2009-08-15 04:05:16: Titanium source look ugly Message-ID: I put titanium pellet on top of the source, but it seems it sliped to side during the run. Because of that titanium source looks ugly. - It works fine though. Sorry about that. From mferrier at snf.stanford.edu Sat Aug 15 12:24:04 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Sat, 15 Aug 2009 12:24:04 -0700 Subject: Problem innotec SNF 2009-08-15 12:24:04: out of pd pellets Message-ID: I used the last 3. there is no Pd pellet left now From rshyam at snf.stanford.edu Sun Aug 16 05:43:01 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 16 Aug 2009 05:43:01 -0700 Subject: Comment innotec SNF 2009-08-16 05:43:01: Cryo temp 18K-19K Message-ID: From tdo at snf.stanford.edu Sun Aug 16 05:53:37 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 16 Aug 2009 05:53:37 -0700 Subject: Problem innotec SNF 2009-08-16 05:53:36: no more au pellets Message-ID: source getting low From tdo at snf.stanford.edu Sun Aug 16 07:39:37 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 16 Aug 2009 07:39:37 -0700 Subject: Comment innotec SNF 2009-08-16 07:39:36: pumpdown 45mins, cryo 16-17k Message-ID: From jimkruger at snf.stanford.edu Mon Aug 17 11:19:08 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:19:08 -0700 Subject: Problem innotec SNF 2009-08-17 11:19:07: Window film at end? Message-ID: also, Flaking up in the shutter prt area. From maurice at snf.stanford.edu Mon Aug 17 11:26:19 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:26:19 -0700 Subject: Problem innotec SNF 2009-08-16 05:53:36: no more au pellets Message-ID: Added Au, Pt and Pd. From maurice at snf.stanford.edu Mon Aug 17 11:26:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:26:29 -0700 Subject: Problem innotec SNF 2009-08-15 12:24:04: out of pd pellets Message-ID: Added Au, Pt and Pd. From maurice at snf.stanford.edu Mon Aug 17 11:27:17 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:27:17 -0700 Subject: Comment innotec SNF 2009-07-22 12:42:34: New Ni and Cu Sources Message-ID: log From maurice at snf.stanford.edu Mon Aug 17 11:27:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:27:29 -0700 Subject: Comment innotec SNF 2009-08-07 14:12:30: gold added to box Message-ID: log From jhaydon at snf.stanford.edu Mon Aug 17 13:44:41 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 17 Aug 2009 13:44:41 -0700 Subject: Problem innotec SNF 2009-08-17 11:19:07: Window film at end? Message-ID: film ok From raneeyoo at snf.stanford.edu Mon Aug 17 18:25:43 2009 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Mon, 17 Aug 2009 18:25:43 -0700 Subject: Problem innotec SNF 2009-08-17 18:25:43: I heard alram from innotec and chamer high pressure sign Message-ID: Hello! When I was near to innotec, I heard alram sound and saw chamber high pressure error. I sent email to ehe. thanks, kyeongran From ehe at snf.stanford.edu Mon Aug 17 23:14:33 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 17 Aug 2009 23:14:33 -0700 Subject: Comment innotec SNF 2009-08-17 23:14:32: follow up on high pres. alarm Message-ID: With high chamber pressure alarm on, I hit the reset button and saw that the chamber pressure was at ~1.2e-6; after some wavering, the chamber finished pumping down and things seemed to run normally. Thanks to the user that sent me an email when she heard the alarm! From bilee at snf.stanford.edu Wed Aug 19 02:13:46 2009 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Wed, 19 Aug 2009 02:13:46 -0700 Subject: Problem innotec SNF 2009-08-19 02:13:45: Pt source is very thin. Message-ID: Pt source is very thin. Needs to be replenished. Used the last pellet and there's no more pellet left. From maurice at snf.stanford.edu Wed Aug 19 14:19:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Aug 2009 14:19:26 -0700 Subject: Problem innotec SNF 2009-08-19 02:13:45: Pt source is very thin. Message-ID: Added more Pt. Just added Pt on Monday. Usage seems high. Over 5800A...spread over 6 or 7 runs in the lat few days. From jimkruger at snf.stanford.edu Mon Aug 24 13:33:53 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:33:53 -0700 Subject: Problem innotec SNF 2009-08-24 13:33:53: Ni pellets all gone Message-ID: From jimkruger at snf.stanford.edu Mon Aug 24 13:36:09 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:36:09 -0700 Subject: Problem innotec SNF 2009-08-24 13:36:08: Shutter spattered-- no clean one available Message-ID: I found the shutter with splatters (globs) of some metal. No clean one could be found so I cleaned the shutter as best I could and replaced it for my run. From maurice at snf.stanford.edu Mon Aug 24 13:49:10 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:49:10 -0700 Subject: Problem innotec SNF 2009-08-24 13:33:53: Ni pellets all gone Message-ID: added more Ni pellets From maurice at snf.stanford.edu Mon Aug 24 13:49:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:49:37 -0700 Subject: Problem innotec SNF 2009-08-17 18:25:43: I heard alram from innotec and chamer high pressure sign Message-ID: logged From maurice at snf.stanford.edu Mon Aug 24 13:50:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:50:31 -0700 Subject: Comment innotec SNF 2009-08-24 13:50:30: Added more Pt pellets Message-ID: Added 30 Pt pellets From maurice at snf.stanford.edu Mon Aug 24 13:50:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:50:48 -0700 Subject: Comment innotec SNF 2009-05-28 15:06:39: new drypump installed Message-ID: logged From maurice at snf.stanford.edu Mon Aug 24 13:51:04 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Aug 2009 13:51:04 -0700 Subject: Comment innotec SNF 2009-08-15 04:05:16: Titanium source look ugly Message-ID: logged From jimkruger at snf.stanford.edu Mon Aug 24 15:57:12 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 24 Aug 2009 15:57:12 -0700 Subject: Problem innotec SNF 2009-08-24 15:57:12: Massive flaking opon venting Message-ID: Shield change one day too late. Mostly clean after much vacuuming From yiwu at snf.stanford.edu Mon Aug 24 23:47:33 2009 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Mon, 24 Aug 2009 23:47:33 -0700 Subject: Comment innotec SNF 2009-08-24 23:47:33: peeling problem Message-ID: When I got here, I notice there are a lot of peeling, particles and other staff inside of the bell jar, especially the peeling on interior of the bell jar. I tried to clean most of it using vacuum, but some obvious particles still left...I didn't do any deposition. From jhaydon at snf.stanford.edu Tue Aug 25 06:51:40 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 25 Aug 2009 06:51:40 -0700 Subject: Shutdown innotec SNF 2009-08-25 06:51:40: sheild change and cryo pump replacement Message-ID: From maurice at snf.stanford.edu Wed Aug 26 14:03:43 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:03:43 -0700 Subject: Shutdown innotec SNF 2009-08-25 06:51:40: sheild change and cryo pump replacement Message-ID: complete system coated with 1000ang Al From maurice at snf.stanford.edu Wed Aug 26 14:03:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:03:59 -0700 Subject: Comment innotec SNF 2009-08-24 23:47:33: peeling problem Message-ID: shields changed From maurice at snf.stanford.edu Wed Aug 26 14:04:12 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:04:12 -0700 Subject: Problem innotec SNF 2009-08-24 15:57:12: Massive flaking opon venting Message-ID: shields changed From maurice at snf.stanford.edu Wed Aug 26 14:04:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:04:27 -0700 Subject: Problem innotec SNF 2009-08-24 13:36:08: Shutter spattered-- no clean one available Message-ID: shutter replaced From maurice at snf.stanford.edu Wed Aug 26 14:04:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:04:47 -0700 Subject: Problem innotec SNF 2009-08-13 14:16:00: Peeling, crystal failure Message-ID: shielding changed From maurice at snf.stanford.edu Wed Aug 26 14:05:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:05:25 -0700 Subject: Problem innotec SNF 2009-08-12 12:42:37: cryo temp high? Message-ID: cryo replaced regen'ed tenp reading 12k From maurice at snf.stanford.edu Wed Aug 26 14:05:40 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:05:40 -0700 Subject: Comment innotec SNF 2009-08-24 13:50:30: Added more Pt pellets Message-ID: logged From maurice at snf.stanford.edu Wed Aug 26 14:05:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:05:59 -0700 Subject: Comment innotec SNF 2009-08-17 23:14:32: follow up on high pres. alarm Message-ID: cryo replaced From maurice at snf.stanford.edu Wed Aug 26 14:06:10 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:06:10 -0700 Subject: Comment innotec SNF 2009-08-16 07:39:36: pumpdown 45mins, cryo 16-17k Message-ID: cryo replaced From maurice at snf.stanford.edu Wed Aug 26 14:06:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:06:16 -0700 Subject: Comment innotec SNF 2009-08-16 05:43:01: Cryo temp 18K-19K Message-ID: cryo replaced From maurice at snf.stanford.edu Wed Aug 26 14:06:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:06:24 -0700 Subject: Comment innotec SNF 2009-08-14 08:05:24: cryo temp stable at 15K throughout run Message-ID: cryo replaced From maurice at snf.stanford.edu Wed Aug 26 14:06:49 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:06:49 -0700 Subject: Comment innotec SNF 2009-08-11 09:57:00: Power up button stuck, ramped up quickly Message-ID: remote replaced From maurice at snf.stanford.edu Wed Aug 26 14:06:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:06:58 -0700 Subject: Comment innotec SNF 2009-08-10 22:01:18: Power up button sticks Message-ID: remote replaced From maurice at snf.stanford.edu Wed Aug 26 14:07:12 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:07:12 -0700 Subject: Comment innotec SNF 2009-07-26 10:23:48: planetary motion not smooth Message-ID: logged From maurice at snf.stanford.edu Wed Aug 26 14:08:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:08:14 -0700 Subject: Comment innotec SNF 2009-06-16 17:17:47: Be careful on lowering BellJar Message-ID: Jim straightened hose From maurice at snf.stanford.edu Wed Aug 26 14:17:51 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Aug 2009 14:17:51 -0700 Subject: Comment innotec SNF 2009-08-26 14:17:50: pumped to 5e-7 in 17 min Message-ID: After first Al coat...system had been open for five minutes...pumped to 5e-7 in 17 min From mtang at snf.stanford.edu Thu Aug 27 09:23:09 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 27 Aug 2009 09:23:09 -0700 Subject: Comment innotec SNF 2009-08-27 09:23:08: Cryo replacement Message-ID: New on-board cryo installed. Should reduce regen time significantly. From jimkruger at snf.stanford.edu Thu Aug 27 16:32:31 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 27 Aug 2009 16:32:31 -0700 Subject: Problem innotec SNF 2009-08-27 16:32:31: Flaking already Message-ID: Flaking from the shiny walls. I cleaned, but flaking continues. Pumpdowns are still good. From ghyrn at snf.stanford.edu Fri Aug 28 08:23:00 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 28 Aug 2009 08:23:00 -0700 Subject: Comment innotec SNF 2009-08-28 08:23:00: crystal failed during Ta evap Message-ID: replaced crystal after finishing off by time From maurice at snf.stanford.edu Fri Aug 28 10:54:05 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Aug 2009 10:54:05 -0700 Subject: Shutdown innotec SNF 2009-08-28 10:54:04: regen after power outage Message-ID: From maurice at snf.stanford.edu Fri Aug 28 15:03:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Aug 2009 15:03:50 -0700 Subject: Shutdown innotec SNF 2009-08-28 10:54:04: regen after power outage Message-ID: regen complete VSC reset From fanpy at snf.stanford.edu Sat Aug 29 00:32:29 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Sat, 29 Aug 2009 00:32:29 -0700 Subject: Comment innotec SNF 2009-08-29 00:32:28: Au target thin & pellets Message-ID: Need Au pellets. From helencxy at snf.stanford.edu Sat Aug 29 20:57:06 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Sat, 29 Aug 2009 20:57:06 -0700 Subject: Problem innotec SNF 2009-08-29 20:57:06: Gold target very low, pallets ran out Message-ID: needs a lot of pallets... From maurice at snf.stanford.edu Sun Aug 30 15:09:17 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 30 Aug 2009 15:09:17 -0700 Subject: Problem innotec SNF 2009-08-29 20:57:06: Gold target very low, pallets ran out Message-ID: added 60 Au pellets From maurice at snf.stanford.edu Sun Aug 30 15:09:33 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 30 Aug 2009 15:09:33 -0700 Subject: Comment innotec SNF 2009-08-29 00:32:28: Au target thin & pellets Message-ID: Au added From jimkruger at snf.stanford.edu Mon Aug 31 09:57:24 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 31 Aug 2009 09:57:24 -0700 Subject: Problem innotec SNF 2009-08-31 09:57:24: found peeling of lower cyl. shields Message-ID: Vacuumed clean and proceeded with loading run. found P= 6.3E-8 after 9:25 of pumping, not used over night. From maurice at snf.stanford.edu Mon Aug 31 16:49:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Aug 2009 16:49:36 -0700 Subject: Problem innotec SNF 2009-08-27 16:32:31: Flaking already Message-ID: Upper shields replaced with old style non shiney ones From maurice at snf.stanford.edu Mon Aug 31 16:49:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Aug 2009 16:49:47 -0700 Subject: Problem innotec SNF 2009-08-31 09:57:24: found peeling of lower cyl. shields Message-ID: Upper shields replaced with old style non shiney ones From maurice at snf.stanford.edu Mon Aug 31 17:33:17 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Aug 2009 17:33:17 -0700 Subject: Comment innotec SNF 2009-08-31 17:33:16: New shields coated Message-ID: 1000 Ang of Al on new upper shields