From jperez at snf.stanford.edu Tue Dec 1 06:26:23 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Dec 2009 06:26:23 -0800 Subject: Problem innotec SNF 2009-11-27 06:26:16: Ti source under platform Message-ID: If you place a clean wipe during load or unload on top of the opening it can help prevent starter sources or pellets from dropping below where the E-gun is and could save us from a more serious problem if it lands on the E-gun. Just remember to remove the clean wipe. From jperez at snf.stanford.edu Tue Dec 1 06:26:53 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Dec 2009 06:26:53 -0800 Subject: Comment innotec SNF 2009-11-27 22:43:47: Ti Source Recovered Message-ID: Good information. From jperez at snf.stanford.edu Tue Dec 1 06:27:53 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Dec 2009 06:27:53 -0800 Subject: Comment innotec SNF 2009-11-29 19:56:17: Crystal failed - changed Message-ID: Thanks for all the information, you're becoming a pro. From yiyang at snf.stanford.edu Wed Dec 2 12:10:43 2009 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Wed, 2 Dec 2009 12:10:43 -0800 Subject: Problem innotec SNF 2009-12-02 12:10:42: interlock WFS2 Message-ID: chamber temperature is high From jhaydon at snf.stanford.edu Wed Dec 2 15:47:00 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 2 Dec 2009 15:47:00 -0800 Subject: Shutdown innotec SNF 2009-12-02 15:46:59: chiller not working may be down for a couple of days Message-ID: From jperez at snf.stanford.edu Thu Dec 3 07:55:00 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Dec 2009 07:55:00 -0800 Subject: Shutdown innotec SNF 2009-12-02 15:46:59: chiller not working may be down for a couple of days Message-ID: Up temporarily for training From jperez at snf.stanford.edu Thu Dec 3 14:12:20 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Dec 2009 14:12:20 -0800 Subject: Shutdown innotec SNF 2009-12-03 14:12:20: Update on Chiller Message-ID: Chiller will come back tomorrow evening, but will have to go throuh leak check, which will most likely happen on Monday. From ehe at snf.stanford.edu Thu Dec 3 16:38:49 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 3 Dec 2009 16:38:49 -0800 Subject: Comment innotec SNF 2009-12-03 16:38:48: fixing time? Message-ID: Since it's getting really close to closing time for SNF and the reservations are really piling up on the innotec, is there any way to expedite the chiller fix instead of waiting until Monday to run the pressure test? Could a student read the pressure Sat. morning and see if it's good enough to use? From jhaydon at snf.stanford.edu Fri Dec 4 10:30:55 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 4 Dec 2009 10:30:55 -0800 Subject: Shutdown innotec SNF 2009-12-03 14:12:20: Update on Chiller Message-ID: new heat excahanger installed but don't use tungstenover the weekend From jperez at snf.stanford.edu Fri Dec 4 10:38:41 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Dec 2009 10:38:41 -0800 Subject: Comment innotec SNF 2009-12-03 16:38:48: fixing time? Message-ID: Completed in stalling Chiller From jperez at snf.stanford.edu Fri Dec 4 10:40:55 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Dec 2009 10:40:55 -0800 Subject: Problem innotec SNF 2009-11-27 19:23:47: Ge source blobbing? Message-ID: May not have been sitting correct in the pocket. May have started moving E-beam too early or too late. New user. From jperez at snf.stanford.edu Fri Dec 4 10:42:32 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Dec 2009 10:42:32 -0800 Subject: Problem innotec SNF 2009-11-26 19:23:26: vacuum flucuation Message-ID: Was not evaporating, but bring up power. Try to bring up power slowly. Jim Haydon is going to be looking at the power supply. From jperez at snf.stanford.edu Fri Dec 4 10:44:00 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Dec 2009 10:44:00 -0800 Subject: Problem innotec SNF 2009-12-02 12:10:42: interlock WFS2 Message-ID: Replaced Chiller. No Tungsten depositions this week-end. May need to add chiller temperature again for W. From tkodama at snf.stanford.edu Sat Dec 5 05:02:12 2009 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sat, 5 Dec 2009 05:02:12 -0800 Subject: Problem innotec SNF 2009-12-05 05:02:12: cause error Message-ID: During the deposition process, power was suddenly off, and the console showed vac error. From usha at snf.stanford.edu Sun Dec 6 20:13:12 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sun, 6 Dec 2009 20:13:12 -0800 Subject: Problem innotec SNF 2009-12-06 20:13:12: Innotec - Ion gauge went off Message-ID: While pumping down before start of deposition, Ion gauge was okay unitl 7E-05 and after a while I noticed it to be off. The cryo temp when starting was 12k and was 21K when noticed. The temp is still rising. Vented the system and took wafers out and replaced metals back. Did not pump down as I was not sure if it was the right thing to do. From ehe at snf.stanford.edu Sun Dec 6 20:36:07 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 6 Dec 2009 20:36:07 -0800 Subject: Comment innotec SNF 2009-12-06 20:36:06: cryopump at 216C Message-ID: Before starting noticed cryopump temp too high; deleting my reservation, someone told me it will probably need >2hrs to cool down again. From ehe at snf.stanford.edu Mon Dec 7 00:03:56 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 7 Dec 2009 00:03:56 -0800 Subject: Comment innotec SNF 2009-12-07 00:03:56: Sorry meant 216K. Message-ID: But had increased to 293K by the time I left SNF at 9:30p From gth at snf.stanford.edu Tue Dec 8 00:16:57 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:16:57 -0800 Subject: Problem innotec SNF 2009-12-08 00:16:57: Al target does not fit in the slot. Message-ID: all other slots are dirty. From mferrier at snf.stanford.edu Tue Dec 8 19:05:34 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Tue, 8 Dec 2009 19:05:34 -0800 Subject: Problem innotec SNF 2009-12-08 19:05:33: lots of very dirty dummy wafers Message-ID: trashed the worst ones and replaced by personnal wafers but it would probably be worth putting a new set From ajamo at snf.stanford.edu Tue Dec 8 19:59:56 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 8 Dec 2009 19:59:56 -0800 Subject: Problem innotec SNF 2009-12-08 19:59:54: Au Source looks contaminated Message-ID: I was prepping for an Au deposition, when I got the Au source out of the jar it is silver colored on top. Looks contaminated. I unloaded my wafers and did not do the deposition. I changed the crystal. From ahazeghi at snf.stanford.edu Wed Dec 9 00:14:16 2009 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 9 Dec 2009 00:14:16 -0800 Subject: Problem innotec SNF 2009-12-09 00:14:15: current source failure Message-ID: Beam tripped during deposition, was able to recover (happened twice) From jperez at snf.stanford.edu Fri Dec 11 07:46:20 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:46:20 -0800 Subject: Problem innotec SNF 2009-12-08 00:16:57: Al target does not fit in the slot. Message-ID: Jim Haydon cleaned out the pockets and I ran a Al deposition. From jperez at snf.stanford.edu Fri Dec 11 13:17:36 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Dec 2009 13:17:36 -0800 Subject: Problem innotec SNF 2009-12-08 19:05:33: lots of very dirty dummy wafers Message-ID: Replaced more of the dummy wafers. Their is a blue box below the Innotec table with clean disks that can be used for dummies. From sgchong at snf.stanford.edu Sat Dec 12 05:56:07 2009 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 12 Dec 2009 05:56:07 -0800 Subject: Comment innotec SNF 2009-12-12 05:56:07: Only two Pt pellets left Message-ID: From sgchong at snf.stanford.edu Sun Dec 13 17:08:31 2009 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 13 Dec 2009 17:08:31 -0800 Subject: Comment innotec SNF 2009-12-13 17:08:31: No Pt pellets left Message-ID: From jperez at snf.stanford.edu Mon Dec 14 10:45:59 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:45:59 -0800 Subject: Comment innotec SNF 2009-12-13 17:08:31: No Pt pellets left Message-ID: Added Pt pellets to baggy. From jperez at snf.stanford.edu Mon Dec 14 10:46:24 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:46:24 -0800 Subject: Comment innotec SNF 2009-12-12 05:56:07: Only two Pt pellets left Message-ID: Added Pt pellets to baggy. From jperez at snf.stanford.edu Mon Dec 14 10:51:35 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:51:35 -0800 Subject: Problem innotec SNF 2009-12-08 19:59:54: Au Source looks contaminated Message-ID: New Au starter source in use. When able use Ti or Cr in C3. I am not sure how we contamined the Au source again so soon. From jperez at snf.stanford.edu Mon Dec 14 10:52:26 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:52:26 -0800 Subject: Comment innotec SNF 2009-12-06 20:36:06: cryopump at 216C Message-ID: Regen the Cryo From jperez at snf.stanford.edu Mon Dec 14 10:52:53 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:52:53 -0800 Subject: Comment innotec SNF 2009-12-07 00:03:56: Sorry meant 216K. Message-ID: regen the Cryo. From jperez at snf.stanford.edu Mon Dec 14 10:53:48 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Dec 2009 10:53:48 -0800 Subject: Problem innotec SNF 2009-12-06 20:13:12: Innotec - Ion gauge went off Message-ID: Cryo was regenerated