Problem innotec SNF 2009-12-06 20:13:12: Innotec - Ion gauge went off

usha at snf.stanford.edu usha at snf.stanford.edu
Sun Dec 6 20:13:12 PST 2009


While pumping down before start of deposition, Ion gauge was okay unitl 7E-05 and after a while I noticed it to be off.  The cryo temp when starting was 12k and was 21K when noticed.  The temp is still rising.  Vented the system and took wafers out and replaced metals back.  Did not pump down as I was not sure if it was the right thing to do.




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