Problem innotec SNF 2009-06-13 16:46:38: WFS1 problem again

duygu at duygu at
Sat Jun 13 16:46:38 PDT 2009

The Interlock WFS1 problem again.The Interlock WFS1 message was flashing. I did Ti evaporation, it went fine. When I moved to second metal Al, I saw the beam at the begining then it went off. Water light on Source 1 went off. I am unloading my sample.

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