From linyoucao at snf.stanford.edu Sun Mar 1 07:43:05 2009 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Sun, 1 Mar 2009 07:43:05 -0800 Subject: Comment innotec SNF 2009-03-01 07:43:05: Water light not lit Message-ID: The Water light was not lit after "Reset". From ahryciw at snf.stanford.edu Mon Mar 2 05:23:18 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Mon, 2 Mar 2009 05:23:18 -0800 Subject: Problem innotec SNF 2009-03-02 05:23:17: System not reaching ATM during vent! Message-ID: Everything was as normal during dep, but now the vent valve has been open, with the readout "system venting," for more than 20 minutes, at the ATM light still has not turned on. Thus, my wafer is stuck inside. From jhaydon at snf.stanford.edu Mon Mar 2 10:49:26 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Mar 2009 10:49:26 -0800 Subject: Problem innotec SNF 2009-03-02 05:23:17: System not reaching ATM during vent! Message-ID: switch appeared to be stuck From junjun at snf.stanford.edu Mon Mar 2 20:46:32 2009 From: junjun at snf.stanford.edu (junjun at snf.stanford.edu) Date: Mon, 2 Mar 2009 20:46:32 -0800 Subject: Problem innotec SNF 2009-03-02 20:46:32: cryopump temperature sudden increase Message-ID: During depositing Ta, cryo T suddenly jumped to 21K from 14K. Ion guage shut off, interlock was triggered. Experiment aborted! From jhaydon at snf.stanford.edu Tue Mar 3 16:06:49 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 3 Mar 2009 16:06:49 -0800 Subject: Problem innotec SNF 2009-02-28 11:48:39: interlock WFS1 Message-ID: water flow switch error may be a computer glitch I used contact cleaner on all the boards and we will see if it fixes the problem From jhaydon at snf.stanford.edu Tue Mar 3 16:07:57 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 3 Mar 2009 16:07:57 -0800 Subject: Problem innotec SNF 2009-02-20 13:19:47: ATM light taking longer than normal (10 sec.) to go out Message-ID: ATM light is turnning off in the corect time now From jhaydon at snf.stanford.edu Tue Mar 3 16:08:56 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 3 Mar 2009 16:08:56 -0800 Subject: Problem innotec SNF 2009-02-28 11:08:01: gun filament is "INTLK", not OFF Message-ID: I believe it normally shows INTLK From gth at snf.stanford.edu Thu Mar 5 02:24:32 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 5 Mar 2009 02:24:32 -0800 Subject: Problem innotec SNF 2009-03-05 02:24:31: not showing dep rate Message-ID: From jperez at snf.stanford.edu Thu Mar 5 08:07:26 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Mar 2009 08:07:26 -0800 Subject: Problem innotec SNF 2009-03-05 02:24:31: not showing dep rate Message-ID: Appears you lose crystal (bad crystal) Replace crystal. From jperez at snf.stanford.edu Mon Mar 9 07:30:15 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Mar 2009 07:30:15 -0700 Subject: Comment innotec SNF 2009-03-01 07:43:05: Water light not lit Message-ID: Hoping that when Jim cleaned the computer board that it took care of the wafer light problem. From fanpy at snf.stanford.edu Mon Mar 9 23:30:24 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Mon, 9 Mar 2009 23:30:24 -0700 Subject: Problem innotec SNF 2009-03-09 23:30:24: Bell jar won't come down Message-ID: the bell jar will not come down, and the ATM light is off. From fanpy at snf.stanford.edu Tue Mar 10 00:11:43 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Tue, 10 Mar 2009 00:11:43 -0700 Subject: Shutdown innotec SNF 2009-03-10 00:11:42: bell jar Message-ID: it won't come down at all and ATM light is off. From jhaydon at snf.stanford.edu Tue Mar 10 07:15:20 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 10 Mar 2009 07:15:20 -0700 Subject: Shutdown innotec SNF 2009-03-10 00:11:42: bell jar Message-ID: The low switch was sticking. I will order new switches From jhaydon at snf.stanford.edu Tue Mar 10 07:15:52 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 10 Mar 2009 07:15:52 -0700 Subject: Problem innotec SNF 2009-03-09 23:30:24: Bell jar won't come down Message-ID: switch was sticking From jimkruger at snf.stanford.edu Tue Mar 10 10:41:06 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 10 Mar 2009 10:41:06 -0700 Subject: Problem innotec SNF 2009-03-10 10:41:05: Bell jar stuck open again Message-ID: From jimkruger at snf.stanford.edu Tue Mar 10 10:54:41 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 10 Mar 2009 10:54:41 -0700 Subject: Comment innotec SNF 2009-03-10 10:54:40: Bell jar lift OK again Message-ID: From jimkruger at snf.stanford.edu Tue Mar 10 13:24:02 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 10 Mar 2009 13:24:02 -0700 Subject: Comment innotec SNF 2009-03-10 13:24:01: Pressure burst at "HV-on" Message-ID: recovered, deposition OK From fanpy at snf.stanford.edu Wed Mar 11 00:02:52 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Wed, 11 Mar 2009 00:02:52 -0700 Subject: Problem innotec SNF 2009-03-11 00:02:51: Bell jar Message-ID: stuck open AGAIN... From fanpy at snf.stanford.edu Wed Mar 11 01:00:03 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Wed, 11 Mar 2009 01:00:03 -0700 Subject: Shutdown innotec SNF 2009-03-11 01:00:03: bell jar Message-ID: stuck open again. This time, I was able to lift it up but can't lower it even the ATM light is on. From jhaydon at snf.stanford.edu Wed Mar 11 07:47:23 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Mar 2009 07:47:23 -0700 Subject: Shutdown innotec SNF 2009-03-11 01:00:03: bell jar Message-ID: stop plate on lift had come up preventing the switch from opening this effected both the up and down switches From jhaydon at snf.stanford.edu Wed Mar 11 07:48:01 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Mar 2009 07:48:01 -0700 Subject: Problem innotec SNF 2009-03-11 00:02:51: Bell jar Message-ID: see shutdown report From jhaydon at snf.stanford.edu Wed Mar 11 11:30:13 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Mar 2009 11:30:13 -0700 Subject: Problem innotec SNF 2009-03-10 10:41:05: Bell jar stuck open again Message-ID: see shutdown report From jhaydon at snf.stanford.edu Wed Mar 11 11:30:23 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Mar 2009 11:30:23 -0700 Subject: Comment innotec SNF 2009-03-10 10:54:40: Bell jar lift OK again Message-ID: From jhaydon at snf.stanford.edu Fri Mar 13 10:24:21 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:24:21 -0700 Subject: Problem innotec SNF 2009-03-13 10:24:21: no copper Message-ID: From ehe at snf.stanford.edu Fri Mar 13 15:29:02 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 13 Mar 2009 15:29:02 -0700 Subject: Problem innotec SNF 2009-03-13 15:29:02: broken wafer in bottom of chamber Message-ID: I found a broken wafer in the bottom of the chamber. Can't reach it to pull the pieces out. From jhpark9 at snf.stanford.edu Sat Mar 14 01:14:58 2009 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Sat, 14 Mar 2009 01:14:58 -0700 Subject: Problem innotec SNF 2009-03-14 01:14:57: chamber cannot be lifted completely Message-ID: After finishing the previous user's process, he couldn't lift the chamber completely. Because I can load my wafers, I am using it. From shuhu at snf.stanford.edu Sat Mar 14 01:35:34 2009 From: shuhu at snf.stanford.edu (shuhu at snf.stanford.edu) Date: Sat, 14 Mar 2009 01:35:34 -0700 Subject: Problem innotec SNF 2009-03-14 01:35:33: Cannot raise the belljar high enough Message-ID: The belljar cannot be raised higher than the plantery. Loading wafers could be problematic. From jhpark9 at snf.stanford.edu Sat Mar 14 03:58:07 2009 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Sat, 14 Mar 2009 03:58:07 -0700 Subject: Shutdown innotec SNF 2009-03-14 03:58:07: belljar doesn't move Message-ID: Belljar doesn't move up and down. From mtang at snf.stanford.edu Sat Mar 14 16:04:39 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 14 Mar 2009 16:04:39 -0700 Subject: Comment innotec SNF 2009-03-14 16:04:38: Jim Haydon is on his way! Message-ID: Jim has been called and is on his way in as I write, to check on the bell jar. From jhaydon at snf.stanford.edu Sat Mar 14 18:01:04 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sat, 14 Mar 2009 18:01:04 -0700 Subject: Shutdown innotec SNF 2009-03-14 03:58:07: belljar doesn't move Message-ID: A different problem then the switch this time. The belt was slipping because the hoist had jammed. This was probably caused be the now badly damaged keyway. I will have to replace the hoist sytem on Monday.I will swap it out with the SCT hoist it should take a few hours. I will not shut it down until then or it fails again. It my squeal now when raising or lowering. From jhaydon at snf.stanford.edu Sat Mar 14 18:05:03 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sat, 14 Mar 2009 18:05:03 -0700 Subject: Comment innotec SNF 2009-03-14 18:05:03: innotec lift (hoist) damaged Message-ID: The lift on the Innotec has a badly damaged keyway and should not be used unless you really need it please read problem report From ehe at snf.stanford.edu Sun Mar 15 03:14:25 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 15 Mar 2009 03:14:25 -0700 Subject: Problem innotec SNF 2009-03-15 03:14:25: ATM light won't go out Message-ID: After evaporation, tried to pumpdown again and couldn't - have to leave chamber vented From lwzhang at snf.stanford.edu Sun Mar 15 09:20:45 2009 From: lwzhang at snf.stanford.edu (lwzhang at snf.stanford.edu) Date: Sun, 15 Mar 2009 09:20:45 -0700 Subject: Problem innotec SNF 2009-03-15 09:20:45: problem (???) Message-ID: I found innotec with the out of service sign on it and the ATM is lit. I checked on coral and the log book and no problems were reported. However I am not going to use the system because I am not sure why the sign is there and the ATM is lit. Lunwei From lwzhang at snf.stanford.edu Sun Mar 15 09:48:26 2009 From: lwzhang at snf.stanford.edu (lwzhang at snf.stanford.edu) Date: Sun, 15 Mar 2009 09:48:26 -0700 Subject: Problem innotec SNF 2009-03-15 09:48:26: Message-ID: From jhaydon at snf.stanford.edu Sun Mar 15 12:08:20 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 15 Mar 2009 12:08:20 -0700 Subject: Problem innotec SNF 2009-03-15 09:48:26: Message-ID: From jhaydon at snf.stanford.edu Sun Mar 15 12:12:31 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 15 Mar 2009 12:12:31 -0700 Subject: Problem innotec SNF 2009-03-15 09:20:45: problem (???) Message-ID: The chamber was not closing properly and could not be pumped down. I realigned chamber and it should be ok. The problem was probably caused by increased vibration of the chamber caused by the rough keyway. From jhaydon at snf.stanford.edu Sun Mar 15 12:13:41 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 15 Mar 2009 12:13:41 -0700 Subject: Problem innotec SNF 2009-03-15 03:14:25: ATM light won't go out Message-ID: realigned chamber From narii at snf.stanford.edu Sun Mar 15 21:56:41 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 15 Mar 2009 21:56:41 -0700 Subject: Problem innotec SNF 2009-03-15 21:56:40: Tilted bell jar Message-ID: Seems like bell jar is tilted so that it doesn't seal the chamber. Try a number of ups and downs, but doesn't work. From mislam at snf.stanford.edu Mon Mar 16 07:55:09 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 16 Mar 2009 07:55:09 -0700 Subject: Shutdown innotec SNF 2009-03-16 07:55:08: down for hoist repair, per Jim Message-ID: From jhaydon at snf.stanford.edu Mon Mar 16 16:27:08 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:27:08 -0700 Subject: Problem innotec SNF 2009-03-16 10:16:15: Message-ID: From maurice at snf.stanford.edu Mon Mar 16 16:30:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:30:30 -0700 Subject: Shutdown innotec SNF 2009-03-16 07:55:08: down for hoist repair, per Jim Message-ID: Hoist repaired (taken from SCT). From maurice at snf.stanford.edu Mon Mar 16 16:30:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:30:42 -0700 Subject: Problem innotec SNF 2009-03-15 21:56:40: Tilted bell jar Message-ID: Hoist repaired (taken from SCT). From maurice at snf.stanford.edu Mon Mar 16 16:30:54 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:30:54 -0700 Subject: Comment innotec SNF 2009-03-14 18:05:03: innotec lift (hoist) damaged Message-ID: Hoist repaired (taken from SCT). From maurice at snf.stanford.edu Mon Mar 16 16:31:15 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:31:15 -0700 Subject: Comment innotec SNF 2009-03-14 16:04:38: Jim Haydon is on his way! Message-ID: archive From maurice at snf.stanford.edu Mon Mar 16 16:31:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:31:25 -0700 Subject: Problem innotec SNF 2009-03-14 01:35:33: Cannot raise the belljar high enough Message-ID: Hoist repaired (taken from SCT). From maurice at snf.stanford.edu Mon Mar 16 16:31:35 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:31:35 -0700 Subject: Problem innotec SNF 2009-03-14 01:14:57: chamber cannot be lifted completely Message-ID: Hoist repaired (taken from SCT). From maurice at snf.stanford.edu Mon Mar 16 16:37:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:37:26 -0700 Subject: Problem innotec SNF 2009-03-16 16:37:26: Belljar lift height limited Message-ID: DO NOT raise the belljar up all the way! On the right side of the belljar is red tape marking the maximum height. The bottom of the belljar can go no higher than the top of the red tape. From maurice at snf.stanford.edu Mon Mar 16 16:39:21 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:39:21 -0700 Subject: Problem innotec SNF 2009-03-16 16:39:21: Longer pump times Message-ID: The belljar was open all day while the hoist was repaired. We expect the pump times to be longer than normal for the next few days. From jhaydon at snf.stanford.edu Wed Mar 18 06:55:21 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Mar 2009 06:55:21 -0700 Subject: Shutdown innotec SNF 2009-03-18 06:55:20: chamber lift work Message-ID: From jhaydon at snf.stanford.edu Wed Mar 18 13:24:01 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Mar 2009 13:24:01 -0700 Subject: Shutdown innotec SNF 2009-03-18 06:55:20: chamber lift work Message-ID: chamber lift repaired From jhaydon at snf.stanford.edu Thu Mar 19 06:53:42 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 19 Mar 2009 06:53:42 -0700 Subject: Problem innotec SNF 2009-03-16 16:37:26: Belljar lift height limited Message-ID: lift repared From jhaydon at snf.stanford.edu Thu Mar 19 06:54:17 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 19 Mar 2009 06:54:17 -0700 Subject: Problem innotec SNF 2009-03-13 15:29:02: broken wafer in bottom of chamber Message-ID: not normally a problem From jperez at snf.stanford.edu Thu Mar 19 07:25:35 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Mar 2009 07:25:35 -0700 Subject: Problem innotec SNF 2009-03-13 10:24:21: no copper Message-ID: Cleaned up drop of contamination on copper starter source. From jperez at snf.stanford.edu Mon Mar 23 07:24:58 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Mar 2009 07:24:58 -0700 Subject: Shutdown innotec SNF 2009-03-23 07:24:58: Innotec in Regen Message-ID: From jperez at snf.stanford.edu Mon Mar 23 13:58:51 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Mar 2009 13:58:51 -0700 Subject: Shutdown innotec SNF 2009-03-23 07:24:58: Innotec in Regen Message-ID: Regen completed! From jperez at snf.stanford.edu Tue Mar 24 07:09:53 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Mar 2009 07:09:53 -0700 Subject: Comment innotec SNF 2009-03-20 04:42:31: Everything seemed normal but nothing deposited Message-ID: If crystal wasn't working, it would of been flashing "Crystal Failure". It sounds like you needed more power. This is a fairly new starter source which sometimes again you'd need more power. From mtang at snf.stanford.edu Thu Mar 26 09:20:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 26 Mar 2009 09:20:47 -0700 Subject: Comment innotec SNF 2009-03-26 09:20:47: Longer pump times under investigation Message-ID: Pump times are longer than desirable, but not too far outside the usual. New oring on order. From yoonyoung at snf.stanford.edu Sat Mar 28 09:42:02 2009 From: yoonyoung at snf.stanford.edu (yoonyoung at snf.stanford.edu) Date: Sat, 28 Mar 2009 09:42:02 -0700 Subject: Problem innotec SNF 2009-03-28 09:42:01: Ion Gauge Problem Message-ID: It seems that the ion gauge has some problem. The Innotec chamber has been pumped down for an hour, and the pressure is now 0.0X10-8. About 10 minutes ago, the pressure was 1.0X10-6. From jperez at snf.stanford.edu Mon Mar 30 14:01:11 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Mar 2009 14:01:11 -0700 Subject: Problem innotec SNF 2009-03-28 09:42:01: Ion Gauge Problem Message-ID: Jim Haydon replaced Ion Gauge! Working fine. From jhaydon at snf.stanford.edu Tue Mar 31 13:36:34 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 31 Mar 2009 13:36:34 -0700 Subject: Problem innotec SNF 2009-03-16 16:39:21: Longer pump times Message-ID: replaced o-ring