Problem innotec SNF 2009-03-02 05:23:17: System not reaching ATM during vent!

ahryciw at snf.stanford.edu ahryciw at snf.stanford.edu
Mon Mar 2 05:23:18 PST 2009


Everything was as normal during dep, but now the vent valve has been open, with the readout "system venting," for more than 20 minutes, at the ATM light still has not turned on.  Thus, my wafer is stuck inside.




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