Problem innotec SNF 2009-03-02 20:46:32: cryopump temperature sudden increase

junjun at snf.stanford.edu junjun at snf.stanford.edu
Mon Mar 2 20:46:32 PST 2009


During depositing Ta, cryo T suddenly jumped to 21K from 14K. Ion guage shut off, interlock was triggered. Experiment aborted!




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