Problem innotec SNF 2009-03-14 01:14:57: chamber cannot be lifted completely

jhpark9 at snf.stanford.edu jhpark9 at snf.stanford.edu
Sat Mar 14 01:14:58 PDT 2009

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After finishing the previous user's process, he couldn't lift the chamber completely. Because I can load my wafers, I am using it.

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