Problem innotec SNF 2009-03-13 15:29:02: broken wafer in bottom of chamber
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Thu Mar 19 06:54:17 PDT 2009
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Problem innotec SNF 2009-03-13 15:29:02: broken wafer in bottom of chamber
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Problem innotec SNF 2009-03-14 01:14:57: chamber cannot be lifted completely
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not normally a problem
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Problem innotec SNF 2009-03-13 15:29:02: broken wafer in bottom of chamber
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Problem innotec SNF 2009-03-14 01:14:57: chamber cannot be lifted completely
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