From maurice at snf.stanford.edu Fri May 1 10:59:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 May 2009 10:59:36 -0700 Subject: Problem innotec SNF 2009-04-30 21:41:11: cannot remove Ge from C1 crucible Message-ID: Ge removed from C1 From mtang at snf.stanford.edu Mon May 4 11:44:56 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 4 May 2009 11:44:56 -0700 Subject: Comment innotec SNF 2009-05-04 11:44:55: Vented screws Message-ID: Jim installed vented (slotted) screws and posts on the shutter film assembly during the last shield change, Tuesday, 4/29. Might improve pumpdowns. From maurice at snf.stanford.edu Tue May 5 14:49:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 May 2009 14:49:25 -0700 Subject: Comment innotec SNF 2009-05-05 14:49:25: Au added to box Message-ID: From jhaydon at snf.stanford.edu Thu May 7 09:10:25 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 7 May 2009 09:10:25 -0700 Subject: Problem innotec SNF 2009-04-10 01:21:52: Temperature spiked to 22 K, then interlocks Message-ID: no new temperature spike recorded From helencxy at snf.stanford.edu Fri May 8 12:05:22 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Fri, 8 May 2009 12:05:22 -0700 Subject: Problem innotec SNF 2009-05-08 12:05:22: High Vac went off during deposition Message-ID: High vaccum gauge suddenly went off during deposition, high voltage/source all went off. Not sure what's wrong, could be a power glitch. From nxs4059 at snf.stanford.edu Fri May 8 15:49:45 2009 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Fri, 8 May 2009 15:49:45 -0700 Subject: Problem innotec SNF 2009-05-08 15:49:45: drops in high voltage power Message-ID: fluctuations in the high voltage panel durring use, it would occasionally drop down from -10kV to ~ -6kV for an instant (the cutback fan light would flash when this happened too) and then resume functionality. From ghyrn at snf.stanford.edu Fri May 8 17:30:14 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 8 May 2009 17:30:14 -0700 Subject: Comment innotec SNF 2009-05-08 17:30:13: Innotec - Changed shutter Message-ID: Changed to new shutter and placed old one under work table in bag. One new shutter remaining. From ghyrn at snf.stanford.edu Fri May 8 18:53:32 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 8 May 2009 18:53:32 -0700 Subject: Comment innotec SNF 2009-05-08 18:53:31: High Voltage fluctuations Message-ID: Momentary fluctuations during deposition. From ehe at snf.stanford.edu Sat May 9 00:35:29 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 9 May 2009 00:35:29 -0700 Subject: Problem innotec SNF 2009-05-09 00:35:28: viewports need to be changed Message-ID: Getting hard to see beam on source - viewports coated (yes, I remembered to advance the film) From ehe at snf.stanford.edu Sat May 9 01:02:12 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 9 May 2009 01:02:12 -0700 Subject: Comment innotec SNF 2009-05-09 01:02:12: removed peeling dummies Message-ID: I removed 6 dummies that were peeling in ribbons - I put them in the dummy box (not sure if they just go into the sharps container for disposal?) Anyway, we need new innotec dummies to replace those. Thanks From maurice at snf.stanford.edu Mon May 11 10:34:03 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 May 2009 10:34:03 -0700 Subject: Comment innotec SNF 2009-05-09 01:02:12: removed peeling dummies Message-ID: dummy wafers added to the box From maurice at snf.stanford.edu Mon May 11 10:34:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 May 2009 10:34:30 -0700 Subject: Comment innotec SNF 2009-05-08 17:30:13: Innotec - Changed shutter Message-ID: logged...thanks for the info From maurice at snf.stanford.edu Mon May 11 10:34:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 May 2009 10:34:46 -0700 Subject: Comment innotec SNF 2009-05-05 14:49:25: Au added to box Message-ID: logged From raneeyoo at snf.stanford.edu Tue May 12 17:45:01 2009 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Tue, 12 May 2009 17:45:01 -0700 Subject: Problem innotec SNF 2009-05-12 17:45:00: crucible does not move Message-ID: Hello! After finishing my deposition, I removed my wafers and the metal materials (Ni at C3). To inspect the crucible, I tried to rotate it from C3 to other. However, it does not move further. I tried to find any SNF staff, but no luck. Now, the system is pumping down. Sorry for any inconvenience. From maurice at snf.stanford.edu Tue May 12 18:10:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 May 2009 18:10:39 -0700 Subject: Problem innotec SNF 2009-05-12 17:45:00: crucible does not move Message-ID: Eric and I remove a small slug of metal melted on crucible near c6. Works now. From maurice at snf.stanford.edu Thu May 14 15:22:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 May 2009 15:22:16 -0700 Subject: Problem innotec SNF 2009-05-14 15:22:16: power up button sticks Message-ID: Remote control power up button sometimes sticks From ghyrn at snf.stanford.edu Fri May 15 11:12:40 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 15 May 2009 11:12:40 -0700 Subject: Comment innotec SNF 2009-05-15 11:12:39: Spare shutter, wrong hole Message-ID: The one remaining spare shutter has the alignment hole on the wrong side - needs a way to plug the hole. Screw? tape? From ghyrn at snf.stanford.edu Fri May 15 12:52:06 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 15 May 2009 12:52:06 -0700 Subject: Comment innotec SNF 2009-05-15 12:52:06: New Remote Message-ID: New remote installed, abort button functions properly. From audet at snf.stanford.edu Mon May 18 02:34:29 2009 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Mon, 18 May 2009 02:34:29 -0700 Subject: Problem innotec SNF 2009-05-18 02:34:28: new Si source needed Message-ID: Si source has been in poor shape for a while, and has finally cracked in two. From audet at snf.stanford.edu Mon May 18 02:35:34 2009 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Mon, 18 May 2009 02:35:34 -0700 Subject: Problem innotec SNF 2009-05-18 02:35:33: Si source needs replacement Message-ID: Si source has been in poor shape for a while, but has finally cracked in two. From xutian at snf.stanford.edu Mon May 18 17:49:05 2009 From: xutian at snf.stanford.edu (xutian at snf.stanford.edu) Date: Mon, 18 May 2009 17:49:05 -0700 Subject: Comment innotec SNF 2009-05-18 17:49:04: Pt pellets only 3 left Message-ID: From jhaydon at snf.stanford.edu Tue May 19 07:44:15 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 19 May 2009 07:44:15 -0700 Subject: Problem innotec SNF 2009-05-14 15:22:16: power up button sticks Message-ID: replaced remote From jperez at snf.stanford.edu Tue May 19 10:49:50 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:49:50 -0700 Subject: Comment innotec SNF 2009-05-18 17:49:04: Pt pellets only 3 left Message-ID: Refill baggy with Pt, Au, Cr, Al, Pd, and replaced Silicon starter source. From jperez at snf.stanford.edu Tue May 19 10:50:45 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:50:45 -0700 Subject: Problem innotec SNF 2009-05-18 02:35:33: Si source needs replacement Message-ID: Replaced Silicon starter source From jperez at snf.stanford.edu Tue May 19 10:51:01 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:51:01 -0700 Subject: Problem innotec SNF 2009-05-18 02:34:28: new Si source needed Message-ID: Replaced starter source. From jperez at snf.stanford.edu Tue May 19 10:51:28 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:51:28 -0700 Subject: Comment innotec SNF 2009-05-15 12:52:06: New Remote Message-ID: Thanks! From jperez at snf.stanford.edu Tue May 19 10:53:00 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:53:00 -0700 Subject: Comment innotec SNF 2009-05-04 11:44:55: Vented screws Message-ID: Has helped pump down some. Getting better! From jperez at snf.stanford.edu Tue May 19 10:54:53 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:54:53 -0700 Subject: Comment innotec SNF 2009-04-24 10:54:42: added Cr and Au pellets Message-ID: Thanks, added pellets to the baggy for Cr, Al, Au, Pt, Pd, Cu and replaced Silicon starter source. From jperez at snf.stanford.edu Tue May 19 10:55:18 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:55:18 -0700 Subject: Problem innotec SNF 2009-05-06 22:24:10: Si source stuck in crucible 1. Message-ID: Removed! From jperez at snf.stanford.edu Tue May 19 10:56:44 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:56:44 -0700 Subject: Comment innotec SNF 2009-05-08 18:53:31: High Voltage fluctuations Message-ID: It will fluctuate some when depositing. Could you tell us by how much? From jperez at snf.stanford.edu Tue May 19 10:57:09 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 10:57:09 -0700 Subject: Problem innotec SNF 2009-05-09 00:35:28: viewports need to be changed Message-ID: Seems to be OK now. From ehe at snf.stanford.edu Tue May 19 15:01:58 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 19 May 2009 15:01:58 -0700 Subject: Problem innotec SNF 2009-05-19 15:01:57: viewing window hard to see through Message-ID: From maurice at snf.stanford.edu Tue May 19 15:35:43 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 May 2009 15:35:43 -0700 Subject: Problem innotec SNF 2009-05-19 15:01:57: viewing window hard to see through Message-ID: Film didn't advance easily...but once it was advanced the view window was clear From dongrip at snf.stanford.edu Thu May 21 06:33:17 2009 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 21 May 2009 06:33:17 -0700 Subject: Problem innotec SNF 2009-05-21 06:33:17: unstable voltage Message-ID: When I raised up the power, the voltage value was fluctuated a lot, and turned off. My speed to raise the power was slow enough, and the previous user also mentioned the similar problem. After that, I pumped down the chamber and tried again. The deposition was successfully done finally. The unstable voltage has to be bewared. From ghyrn at snf.stanford.edu Fri May 22 16:59:15 2009 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Fri, 22 May 2009 16:59:15 -0700 Subject: Comment innotec SNF 2009-05-22 16:59:14: Dummy wafers heavy? Message-ID: Noticed that the planetary wobbled and there was a clicking noise. Deposition was fine though. Also, hard to get innermost clips on as the dummy wafers were thicker than the holder. From hailiang at snf.stanford.edu Mon May 25 21:26:49 2009 From: hailiang at snf.stanford.edu (hailiang at snf.stanford.edu) Date: Mon, 25 May 2009 21:26:49 -0700 Subject: Problem innotec SNF 2009-05-25 21:26:48: Au source will die out soon, need new pellets Message-ID: From jperez at snf.stanford.edu Tue May 26 10:14:30 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 May 2009 10:14:30 -0700 Subject: Problem innotec SNF 2009-05-25 21:26:48: Au source will die out soon, need new pellets Message-ID: Gold pellets added! If any starter sources are too low (below half the orginal size) DO NOT USE! From jperez at snf.stanford.edu Thu May 28 07:21:24 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 May 2009 07:21:24 -0700 Subject: Comment innotec SNF 2009-05-22 16:59:14: Dummy wafers heavy? Message-ID: Thanks for the information. I also tested the system and everything was normal. The Planetary has wobbled in the past, but one planetary more than the other . Did not hear any unusual noise. From jperez at snf.stanford.edu Thu May 28 09:32:43 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 May 2009 09:32:43 -0700 Subject: Shutdown innotec SNF 2009-05-28 09:32:43: Regen in process Message-ID: From jhaydon at snf.stanford.edu Thu May 28 15:06:39 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 28 May 2009 15:06:39 -0700 Subject: Comment innotec SNF 2009-05-28 15:06:39: new drypump installed Message-ID: A new drypump has been instlled behind the Innotec. It will start and stop as needed. It will make some noise when it turns under high pressure and will become quite when the the chamber pressure comes down. Pump down performance should be about the same 5 minutes or so. From jhaydon at snf.stanford.edu Thu May 28 16:22:48 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 28 May 2009 16:22:48 -0700 Subject: Shutdown innotec SNF 2009-05-28 09:32:43: Regen in process Message-ID: ok to use when regen completed From linyoucao at snf.stanford.edu Fri May 29 11:51:16 2009 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Fri, 29 May 2009 11:51:16 -0700 Subject: Problem innotec SNF 2009-05-29 11:51:16: zero high voltage Message-ID: the high voltage shows zero rather than 10 as usual. From maurice at snf.stanford.edu Fri May 29 11:58:35 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 May 2009 11:58:35 -0700 Subject: Problem innotec SNF 2009-05-29 11:51:16: zero high voltage Message-ID: worked on the 8th try...strange From haiwei at snf.stanford.edu Sat May 30 12:59:18 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 30 May 2009 12:59:18 -0700 Subject: Problem innotec SNF 2009-05-30 12:59:17: Au source damaged Message-ID: a big hold found in the Au source before I use it. I will add pellets to see whether the hole can be filled. From ehe at snf.stanford.edu Sat May 30 17:36:36 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 30 May 2009 17:36:36 -0700 Subject: Problem innotec SNF 2009-05-30 17:36:36: pump abnormally loud, chamber peeling Message-ID: The chamber wall is peeling everywhere, it needs to be cleaned (even after trying to remove dangerous pieces it looks like something could break off during a deposition - I can't remove everything) Pump was abnormally loud during first stage of pumpdown (loud knocking).