Problem innotec SNF 2009-05-08 12:05:22: High Vac went off during deposition

helencxy at snf.stanford.edu helencxy at snf.stanford.edu
Fri May 8 12:05:22 PDT 2009


High vaccum gauge suddenly went off during deposition, high voltage/source all went off. Not sure what's wrong, could be a power glitch.




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