Problem innotec SNF 2009-05-12 17:45:00: crucible does not move

raneeyoo at raneeyoo at
Tue May 12 17:45:01 PDT 2009

After finishing my deposition, I removed my wafers and the metal materials (Ni at C3).  To inspect the crucible, I tried to rotate it from C3 to other.  However, it does not move further.  I tried to find any SNF staff, but no luck.  Now, the system is pumping down.
Sorry for any inconvenience.

More information about the innotec-pcs mailing list