Problem innotec SNF 2009-05-12 17:45:00: crucible does not move

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Tue May 12 17:45:01 PDT 2009


Hello!
After finishing my deposition, I removed my wafers and the metal materials (Ni at C3).  To inspect the crucible, I tried to rotate it from C3 to other.  However, it does not move further.  I tried to find any SNF staff, but no luck.  Now, the system is pumping down.
Sorry for any inconvenience.




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