Problem innotec SNF 2009-05-21 06:33:17: unstable voltage

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Thu May 21 06:33:17 PDT 2009


When I raised up the power, the voltage value was fluctuated a lot, and turned off. My speed to raise the power was slow enough, and the previous user also mentioned the similar problem. After that, I pumped down the chamber and tried again. The deposition was successfully done finally. The unstable voltage has to be bewared.




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