Comment innotec SNF 2009-05-22 16:59:14: Dummy wafers heavy?

ghyrn at snf.stanford.edu ghyrn at snf.stanford.edu
Fri May 22 16:59:15 PDT 2009


Noticed that the planetary wobbled and there was a clicking noise. Deposition was fine though. Also, hard to get innermost clips on as the dummy wafers were thicker than the holder.




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