Problem innotec SNF 2009-05-30 17:36:36: pump abnormally loud, chamber peeling

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sat May 30 17:36:36 PDT 2009


The chamber wall is peeling everywhere, it needs to be cleaned (even after trying to remove dangerous pieces it looks like something could break off during a deposition - I can't remove everything)
Pump was abnormally loud during first stage of pumpdown (loud knocking).




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