Comment innotec SNF 2009-11-06 23:27:37: longer pump down + change shutter

jperez at jperez at
Tue Nov 17 07:30:00 PST 2009

Sometimes you'll see a long pump down due to many different 
things, like; peeling, touched inside chamber with dirty gloves,
wafers outgasing, chamber open too long, etc. Should reserve enough 
time for things that may occur.

More information about the innotec-pcs mailing list