Comment innotec SNF 2009-11-06 23:27:37: longer pump down + change shutter

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Nov 17 07:30:00 PST 2009


Sometimes you'll see a long pump down due to many different 
things, like; peeling, touched inside chamber with dirty gloves,
wafers outgasing, chamber open too long, etc. Should reserve enough 
time for things that may occur.




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